SCOPUS 정보 검색 플랫폼

Volumn 259, Issue , 2012, Pages 371-375

The chemical characterization and reflectivity of the Al(1.0%wtSi)/Zr periodic multilayer

(7) Zhong, Qi a Zhang, Zhong a Zhu, Jingtao a Wang, Zhanshan a Jonnard, Philippe b Le Guen, Karine b André, Jean Michel b

a TONGJI UNIVERSITY (China)

b SORBONNE UNIVERSITÉ (France)

Author keywords

Al(1.0 wtSi) Zr multilayer; EUV reflectivity; Interface; Simulation; XPS

Indexed keywords

INTERFACES (MATERIALS); MULTILAYERS; REFLECTION; X RAY DIFFRACTION;

CHEMICAL CHARACTERIZATION; EUV REFLECTIVITY; IMPACT FACTOR; INCIDENCE ANGLES; PEAK REFLECTIVITY; PERIODIC MULTILAYERS; SIMULATION; THEORETICAL VALUES;

X RAY PHOTOELECTRON SPECTROSCOPY;

EID: 84866024287 PISSN: 01694332 EISSN: None Source Type: Journal
DOI: 10.1016/j.apsusc.2012.07.054 Document Type: Article

Times cited : (15)

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