Hard HfB 2 tip-coatings for ultrahigh density probe-based storage

Applied Physics Letters

Volumn 101, Issue 9, 2012, Pages

  Tayebi, Noureddine ^a,b   Yanguas Gil, Angel ^c   Kumar, Navneet ^c   Zhang, Yuegang ^a,d   Abelson, John R ^c   Nishi, Yoshio ^b   Ma, Qing ^a   Rao, Valluri R ^a  

^a INTEL CORPORATION   (United States)

^b Stanford University   (United States)

^c University of Illinois at Urbana Champaign   (United States)

^d LAWRENCE BERKELEY NATIONAL LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COATING TECHNOLOGIES; CONDUCTIVE COATINGS; DEVICE LIFETIME; HIGH MECHANICAL PROPERTIES; LOW TEMPERATURES; NANOELECTROMECHANICAL DEVICES; PROBE-BASED; SCANNING PROBES; ULTRAHIGH DENSITY; WEAR ENDURANCE;

CHEMICAL VAPOR DEPOSITION; DEGRADATION; MECHANICAL PROPERTIES;

COATINGS;

EID: 84865854061     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.4748983     Document Type: Article

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