Crystalline texture in hafnium diboride thin films grown by chemical vapor deposition

Journal of Crystal Growth

Volumn 294, Issue 2, 2006, Pages 389-395

  Yang, Yu ^a   Jayaraman, Sreenivas ^a   Kim, Do Young ^a,b   Girolami, Gregory S ^a,b   Abelson, John R ^a  

^a University of Illinois at Urbana Champaign   (United States)

^b UNIVERSITY OF ILLINOIS AT URBANA CHAMPAIGN   (United States)

Author keywords

A3. Chemical vapor deposition processes; A3. Crystalline texture; B1. Metal diborides

Indexed keywords

CHEMICAL VAPOR DEPOSITION; CRYSTAL ORIENTATION; FILM GROWTH; GROWTH TEMPERATURE; HAFNIUM COMPOUNDS; SINGLE CRYSTALS;

AMORPHOUS SUBSTRATES; CRYSTALLINE TEXTURE; IN-PLANE TEXTURE; METAL DIBORIDES; SINGLE SOURCE PRECURSOR;

THIN FILMS;

EID: 33846201946     PISSN: 00220248     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jcrysgro.2006.05.035     Document Type: Article

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