Integrating nanotechnology into a working storage device

Microelectronic Engineering

Volumn 83, Issue 4-9 SPEC. ISS., 2006, Pages 1692-1697

  Knoll, A ^a   Bachtold P ^a   Bonan, J ^a   Cherubini, G ^a   Despont, M ^a   Drechsler, U ^a   Durig U ^a   Gotsmann, B ^a   Haberle W ^a   Hagleitner, C ^a   Jubin, D ^a   Lantz, M A ^a   Pantazi, A ^a   Pozidis, H ^a   Rothuizen, H ^a   Sebastian, A ^a   Stutz, R ^a   Vettiger, P ^a   Wiesmann, D ^a   Eleftheriou, E S ^a  

^a IBM RESEARCH ZURICH   (Switzerland)

Author keywords

AFM; MEMS; Polymers; Probe storage

Indexed keywords

ATOMIC FORCE MICROSCOPY; DATA STORAGE EQUIPMENT; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; PLASTIC FILMS; PROBES;

AFM; MEMS; NANOMECHANICAL CANTILEVERS; PROBE STORAGE;

NANOTECHNOLOGY;

EID: 33646057714     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2006.01.206     Document Type: Article

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