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Volumn 200, Issue 22-23 SPEC. ISS., 2006, Pages 6629-6633

HfB2 and Hf-B-N hard coatings by chemical vapor deposition

Author keywords

CVD; Hafnium borohydride; Hafnium diboride; Hard coating; Nanocomposite; Nanoindentation

Indexed keywords

ANNEALING; DEPOSITION; HAFNIUM COMPOUNDS; HARDNESS; NANOSTRUCTURED MATERIALS; THIN FILMS;

EID: 33646125423     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2005.11.040     Document Type: Article
Times cited : (75)

References (35)
  • 25
    • 31044452458 scopus 로고    scopus 로고
    • Hafnium Diboride Thin Films by Chemical Vapor Deposition from a Single Source Precursor
    • Jayaraman S., Yang Y., Kim D.-Y., Girolami G.S., and Abelson J.R. Hafnium Diboride Thin Films by Chemical Vapor Deposition from a Single Source Precursor. J. Vac. Sci. Technol. 23 (2005) 1619
    • (2005) J. Vac. Sci. Technol. , vol.23 , pp. 1619
    • Jayaraman, S.1    Yang, Y.2    Kim, D.-Y.3    Girolami, G.S.4    Abelson, J.R.5


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.