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Volumn 200, Issue 22-23 SPEC. ISS., 2006, Pages 6629-6633
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HfB2 and Hf-B-N hard coatings by chemical vapor deposition
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Author keywords
CVD; Hafnium borohydride; Hafnium diboride; Hard coating; Nanocomposite; Nanoindentation
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Indexed keywords
ANNEALING;
DEPOSITION;
HAFNIUM COMPOUNDS;
HARDNESS;
NANOSTRUCTURED MATERIALS;
THIN FILMS;
ATOMIC NITROGEN;
DEPOSITION TEMPERATURE;
GROWTH FLUX;
HAFNIUM BOROHYDRIDE;
HAFNIUM DIBORIDE;
HARD COATINGS;
LOW ELASTIC MODULUS;
CHEMICAL VAPOR DEPOSITION;
ANNEALING;
CHEMICAL VAPOR DEPOSITION;
DEPOSITION;
HAFNIUM COMPOUNDS;
HARDNESS;
NANOSTRUCTURED MATERIALS;
THIN FILMS;
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EID: 33646125423
PISSN: 02578972
EISSN: None
Source Type: Journal
DOI: 10.1016/j.surfcoat.2005.11.040 Document Type: Article |
Times cited : (75)
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References (35)
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