Large arrays of chemo-mechanical nanoswitches for ultralow-power hydrogen sensing

Journal of Micromechanics and Microengineering

Volumn 20, Issue 10, 2010, Pages

  Kiefer, T ^a   Salette, A ^a   Villanueva, L G ^a   Brugger, J ^a  

^a EPFL   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

ARBITRARY TOPOLOGY; BOTTOM ELECTRODES; ELECTRICAL RESISTANCES; HYDROGEN EXPOSURE; HYDROGEN SENSOR; HYDROGEN-SENSING; INTERCONNECTED ARRAYS; LARGE ARRAYS; LARGE-SCALE FABRICATION; LINEAR CHAIN; MECHANICAL BENDING; NANO-SWITCHES; NANOSWITCH; PERCOLATION EFFECTS; POWER CONSUMPTION; REVERSIBLE CHANGE; SENSOR SIGNALS; SQUARE LATTICES; THREE ORDERS OF MAGNITUDE; ULTRA-LOW POWER; VOLUME EXPANSION;

ELECTRIC CONNECTORS; ELECTRIC SWITCHGEAR; PALLADIUM; SENSORS; SOLVENTS; TEMPERATURE MEASUREMENT;

HYDROGEN;

EID: 78049327473     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/20/10/105019     Document Type: Article

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