Quantum lithography: Status of the field

Quantum Information Processing

Volumn 11, Issue 4, 2012, Pages 891-901

  Boyd, Robert W ^a,b   Dowling, Jonathan P ^c  

^a UNIVERSITY OF ROCHESTER   (United States)

^b UNIVERSITY OF OTTAWA   (Canada)

^c LOUISIANA STATE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CONCEPTUAL FOUNDATIONS; MULTI-PHOTON ABSORPTION; QUANTUM LITHOGRAPHY; RECORDING MATERIALS;

MULTIPHOTON PROCESSES;

LITHOGRAPHY;

EID: 84865749419     PISSN: 15700755     EISSN: None     Source Type: Journal    
DOI: 10.1007/s11128-011-0253-y     Document Type: Article

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