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Volumn 53, Issue 5-6, 2006, Pages 713-718
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Recent progress in quantum and nonlinear optical lithography
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Author keywords
[No Author keywords available]
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Indexed keywords
NONLINEAR OPTICS;
QUANTUM OPTICS;
QUANTUM THEORY;
RAYLEIGH FADING;
QUANTUM LITHOGRAPHY;
QUANTUM-MECHANICAL EFFECTS;
PHOTOLITHOGRAPHY;
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EID: 33644591295
PISSN: 09500340
EISSN: None
Source Type: Journal
DOI: 10.1080/09500340500283722 Document Type: Conference Paper |
Times cited : (21)
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References (25)
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