Quantum interferometric optical lithography: Exploiting entanglement to beat the diffraction limit

Physical Review Letters

Volumn 85, Issue 13, 2000, Pages 2733-2736

  Boto, Agedi N ^a   Kok, Pieter ^b   Abrams, Daniel S ^a   Braunstein, Samuel L ^b   Williams, Colin P ^a   Dowling, Jonathan P ^a  

^a CALIFORNIA INSTITUTE OF TECHNOLOGY   (United States)

^b BANGOR UNIVERSITY   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

INTERFEROMETRY; LIGHT ABSORPTION; OPTICAL RESOLVING POWER; PHOTONS; QUANTUM THEORY;

QUANTUM INTERFEROMETRIC OPTICAL LITHOGRAPHY;

PHOTORESISTS;

EID: 0034714670     PISSN: 00319007     EISSN: 10797114     Source Type: Journal    
DOI: 10.1103/PhysRevLett.85.2733     Document Type: Article

References (25)

1. A. Hawryliw, Microelectron. Eng. 35, 11 (1997).
2. S. R. J. Brueck et al., Microelectron. Eng. 42, 145 (1998).
3. S. R. J. Brueck et al., Lord Rayleigh, Philos. Mag. 8, 261 (1879)
4. M. Born and E. Wolf, Principles of Optics (Pergamon Press, New York, 1980), 6th ed., Sec. 7.6.3.
5. E. Yablonovitch and R. B. Vrijen, Opt. Eng. 38, 334 (1999).
6. B. Yurke, Phys. Rev. Lett. 56, 1515 (1986)
7. M. Hillery et al., Quantum Semiclass. Opt. 8, 1041 (1996)
8. T. Kim et al., Phys. Rev. A 57, 4004 (1998).
9. J. P. Dowling, Phys. Rev. A 57, 4736 (1998).
10. A. Kuzmich and L. Mandel, Quantum Semiclass. Opt. 10, 493 (1998)
11. E. J. S. Fonseca et al., Phys. Rev. A 60, 1530 (1999).
12. J. P. Dowling, IEE Proc., Optoelectron. 145, 420 (1998).
13. M. Göppert-Mayer, Ann. Phys. (Leipzig) 5, 273 (1931).
14. J. Javanainen and P. L. Gould, Phys. Rev. A 41, 5088 (1990).
15. J. Perina, Jr., B. E. A. Saleh, and M. C. Teich, Phys. Rev. A 57, 3972 (1998).
16. S. F. Huelga et al., Phys. Rev. Lett. 79, 3865 (1997).
17. C. K. Hong and L. Mandel, Phys. Rev. A 31, 2409 (1985).
18. I. H. Deutsch, R. Y. Chiao, and J. C. Garrison, Phys. Rev. A 47, 3330 (1993)
19. T. B. Pittman et al., Phys. Rev. Lett. 77, 1917 (1996).
20. T. E. Keller, M. H. Rubin, and Y. Shih, Phys. Rev. A 57, 2076 (1998).
21. J. D. Franson, Phys. Rev. Lett. 78, 3852 (1997)
22. J. D. Franson and T. B. Pittman, Phys. Rev. A 60, 917 (1999)
23. J. D. Franson, T. B. Pittman, and J. P. Dowling, quant-ph/9912121.
24. P. Kok, A. N. Boto, D. S. Abrams, C. P. Williams, S. L. Braunstein, and J. P. Dowling (to be published).
25. H. Watanabe, Y. C. Pati, and R. F. Pease, Jpn. J. Appl. Phys. I 33, 6790 (1994).