Nonlinear optical lithography with ultra-high sub-Rayleigh resolution

Optics Express

Volumn 12, Issue 23, 2004, Pages 5735-5740

  Bentley, Sean J ^a,b   Boyd, Robert W ^a  

^a UNIVERSITY OF ROCHESTER   (United States)

^b ADELPHI UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CAMERAS; CHARGE COUPLED DEVICES; NONLINEAR OPTICS; PHOTONS; QUANTUM THEORY; SECOND HARMONIC GENERATION;

MULTIPHOTON ABSORPTION; OPTICAL FIELD STRENGTH; QUANTUM LITHOGRAPHY;

PHOTOLITHOGRAPHY;

EID: 10444279269     PISSN: 10944087     EISSN: None     Source Type: Journal    
DOI: 10.1364/OPEX.12.005735     Document Type: Article

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