SCOPUS 정보 검색 플랫폼

Microelectronic Engineering

Volumn 98, Issue , 2012, Pages 246-249

Thermal nanoimprint lithography using fluoropolymer mold

(6) Con, Celal a Zhang, Jian a Jahed, Zeinab a Tsui, Ting Y a Yavuz, Mustafa a Cui, Bo a

a UNIVERSITY OF WATERLOO (Canada)

Author keywords

Fluoropolymer; Mold; Nanofabrication; Nanoimprint lithography; Perfluoropolyether; Soft lithography

Indexed keywords

CONFORMAL CONTACTS; DEMOLDING; FILM SURFACES; FLUOROPOLYMER; HALF-PITCH GRATINGS; HIGH ELASTIC MODULUS; HIGH RESOLUTION; LINE EDGE ROUGHNESS; MASTER MOLDS; MOLD MATERIALS; NANOINDENTATION EXPERIMENTS; PERFLUOROPOLYETHERS; SOFT LITHOGRAPHY; THERMAL NANOIMPRINT LITHOGRAPHY; TOP SURFACE;

ELASTIC MODULI; FLUORINE CONTAINING POLYMERS; FUNGI; NANOIMPRINT LITHOGRAPHY; NANOTECHNOLOGY;

MOLDS;

EID: 84865610133 PISSN: 01679317 EISSN: None Source Type: Journal
DOI: 10.1016/j.mee.2012.07.007 Document Type: Conference Paper

Times cited : (21)

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