Fully automated hot embossing processes utilizing high resolution working stamps

Journal of Vacuum Science and Technology B

Volumn 28, Issue 1, 2010, Pages 36-41

  Glinsner, T ^a   Veres, T ^b   Kreindl, G ^a   Roy, E ^b   Morton, K ^b   Wieser, T ^a   Thanner, C ^a   Treiblmayr, D ^a   Miller, R ^c   Lindner, P ^a  

^a DI Erich Thallner   (Austria)

^b NATIONAL RESEARCH COUNCIL CANADA   (Canada)

^c EV Group Inc   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ASPECT RATIO; AUTOMATION; HOT WORKING; PLASMONICS; SUBSTRATES;

FULLY AUTOMATED; HIGH RESOLUTION; HOT EMBOSSING PROCESS; HOT-EMBOSSING; NANO METER RANGE; POLYMER SUBSTRATE; REPLICATION TECHNOLOGY; SPIN-ON; STAMP MATERIALS; WORKING STAMPS;

NANOIMPRINT LITHOGRAPHY;

EID: 77949416135     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.3269800     Document Type: Conference Paper

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