SCOPUS 정보 검색 플랫폼

Journal of Vacuum Science and Technology B

Volumn 29, Issue 2, 2011, Pages

UV-based nanoimprinting lithography with a fluorinated flexible stamp

(5) Zhu, Zhendong a Li, Qunqing a Zhang, Lihui a Chen, Mo a Fan, Shoushan a

a TSINGHUA UNIVERSITY (China)

Author keywords

[No Author keywords available]

Indexed keywords

DENDRIMERS; ELASTIC MODULI; INDIUM COMPOUNDS; TIN OXIDES;

ENHANCED STABILITY; HYPERBRANCHED POLYMERS; INDIUM TIN OXIDE; NANO-IMPRINTING; NANOIMPRINTING LITHOGRAPHY; PATTERN TRANSFERS; PERFLUOROPOLYETHERS; SOFT SUBSTRATES;

NANOIMPRINT LITHOGRAPHY;

EID: 79953772519 PISSN: 21662746 EISSN: 21662754 Source Type: Journal
DOI: 10.1116/1.3554638 Document Type: Article

Times cited : (6)

References (20)

1
- 77956443287
- 0036-8075
- S. Y. Chou, P. R. Krauss, and P. J. Renstrom, Science 0036-8075 85, 5258 (1996).
- (1996) Science , vol.85 , pp. 5258
- Chou, S.Y.¹ Krauss, P.R.² Renstrom, P.J.³

2
- 0037142072
- Ultrafast and direct imprint of nanostructures in silicon
- DOI 10.1038/nature00792
- S. Y. Chou, C. Keimel, and J. Gu, Nature (London) 0028-0836 417, 835 (2002). 10.1038/nature00792 (Pubitemid 34670326)
- (2002) Nature , vol.417 , Issue.6891 , pp. 835-837
- Chou, S.Y.¹ Keimel, C.² Gu, J.³

3
- 0142037327
- 0003-6951, 10.1063/1.114851
- S. Y. Chou, P. R. Krauss, and P. J. Renstrom, Appl. Phys. Lett. 0003-6951 67, 3114 (1995). 10.1063/1.114851
- (1995) Appl. Phys. Lett. , vol.67 , pp. 3114
- Chou, S.Y.¹ Krauss, P.R.² Renstrom, P.J.³

4
- 34548424161
- Self-formation of sub-60-nm half-pitch gratings with large areas through fracturing
- DOI 10.1038/nnano.2007.264, PII NNANO2007264
- L. F. Pease, P. Deshpande, Y. Wang, and S. Y. Chou, Nat. Nanotechnol. 1748-3387 2, 545 (2007). 10.1038/nnano.2007.264 (Pubitemid 47367546)
- (2007) Nature Nanotechnology , vol.2 , Issue.9 , pp. 545-548
- Pease III, L.F.¹ Deshpande, P.² Wang, Y.³ Russel, W.B.⁴ Chou, S.Y.⁵

5
- 20844442266
- Nanotransfer printing of organic and carbon nanotube thin-film transistors on plastic substrates
- DOI 10.1063/1.1901809, 163101
- D. R. Hines, S. Mezhenny, M. Breban, and E. D. Williams, Appl. Phys. Lett. 0003-6951 86, 163101 (2005). 10.1063/1.1901809 (Pubitemid 40861346)
- (2005) Applied Physics Letters , vol.86 , Issue.16 , pp. 1-3
- Hines, D.R.¹ Mezhenny, S.² Breban, M.³ Williams, E.D.⁴ Ballarotto, V.W.⁵ Esen, G.⁶ Southard, A.⁷ Fuhrer, M.S.⁸

6
- 43449107662
- Large-area ultrathin films of reduced graphene oxide as a transparent and flexible electronic material
- DOI 10.1038/nnano.2008.83, PII NNANO200883
- G. Eda, G. Fanchini, and M. Chhowalla, Nat. Nanotechnol. 1748-3387 3, 270 (2008). 10.1038/nnano.2008.83 (Pubitemid 351668055)
- (2008) Nature Nanotechnology , vol.3 , Issue.5 , pp. 270-274
- Eda, G.¹ Fanchini, G.² Chhowalla, M.³

7
- 34247189149
- Light output enhancement of a GaN-based light emitting diode by polymer film imprinting
- DOI 10.1088/0268-1242/22/3/018, PII S0268124207310638, 018
- Z. M. Wang, Semicond. Sci. Technol. 0268-1242 22, 279 (2007). 10.1088/0268-1242/22/3/018 (Pubitemid 46620816)
- (2007) Semiconductor Science and Technology , vol.22 , Issue.3 , pp. 279-282
- Wang, Z.M.¹ Luo, X.J.² Wang, S.³ Luo, C.X.⁴ Sun, M.H.⁵ Bao, K.⁶ Zhang, B.⁷ Zhang, G.Y.⁸ Wang, Y.G.⁹ Chen, Y.¹⁰ Ji, H.¹¹ Ouyang, Q.¹²

8
- 33947602407
- Flexible conjugated polymer photovoltaic cells with controlled heterojunctions fabricated using nanoimprint lithography
- DOI 10.1063/1.2715036
- M. -S. Kim, J. -S. Kim, J. C. Cho, M. Stein, J. Kim, L. J. Guo, and J. Kim, Appl. Phys. Lett. 0003-6951 90, 123113 (2007). 10.1063/1.2715036 (Pubitemid 46482271)
- (2007) Applied Physics Letters , vol.90 , Issue.12 , pp. 123113
- Kim, M.-S.¹ Kim, J.-S.² Cho, J.C.³ Shtein, M.⁴ Guo, L.J.⁵ Kim, J.⁶

9
- 61449129129
- 1530-6984, 10.1021/nl801030c
- Y. Wang, X. Liang, Y. Liang, and S. Y. Chou, Nano Lett. 1530-6984 8, 1986 (2008). 10.1021/nl801030c
- (2008) Nano Lett. , vol.8 , pp. 1986
- Wang, Y.¹ Liang, X.² Liang, Y.³ Chou, S.Y.⁴

10
- 38049184247
- 1530-6984, 10.1021/nl072253x
- X. Liang, K. J. Morton, R. H. Austin, and S. Y. Chou, Nano Lett. 1530-6984 7, 3774 (2007). 10.1021/nl072253x
- (2007) Nano Lett. , vol.7 , pp. 3774
- Liang, X.¹ Morton, K.J.² Austin, R.H.³ Chou, S.Y.⁴

11
- 79952453289
- 0935-9648, 10.1002/adma.200890067
- M. G. Kang, M. S. Kim, and L. J. Guo, Adv. Mater. 0935-9648 20, A1 (2008). 10.1002/adma.200890067
- (2008) Adv. Mater. , vol.20 , pp. 1
- Kang, M.G.¹ Kim, M.S.² Guo, L.J.³

12
- 31144460253
- Nanoimprint and nanocontact technologies using hydrogen silsesquioxane
- DOI 10.1116/1.1868695
- K. -I. Nakamatsu, K. Watanabe, K. Tone, H. Namatsu, and S. Matsui, J. Vac. Sci. Technol. B 1071-1023 23, 507 (2005). 10.1116/1.1868695 (Pubitemid 43126455)
- (2005) Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures , vol.23 , Issue.2 , pp. 507-512
- Nakamatsu, K.-I.¹ Watanabe, K.² Tone, K.³ Namatsu, H.⁴ Matsui, S.⁵

13
- 26944450726
- (Kluwer, Dordrecht / Plenum, New York)
- C. M. Sotomayor-Torres, Alternative Lithography: Unleashing the Potentials of Nanotechnology (Kluwer, Dordrecht / Plenum, New York, 2003), p. 105.
- (2003) Alternative Lithography: Unleashing the Potentials of Nanotechnology , pp. 105
- Sotomayor-Torres, C.M.¹

14
- 34247638016
- Simple high resolution nanoimprint-lithography
- DOI 10.1016/j.mee.2007.01.020, PII S0167931707000676, Proceedings of the 32nd International Conference on Micro- and Nano-Engineering
- M. Häffner, A. Heeren, M. Fleischer, D. P. Kern, G. Schmidt, and L. W. Molenkamp, Microelectron. Eng. 0167-9317 84, 937 (2007). 10.1016/j.mee.2007. 01.020 (Pubitemid 46678317)
- (2007) Microelectronic Engineering , vol.84 , Issue.5-8 , pp. 937-939
- Haffner, M.¹ Heeren, A.² Fleischer, M.³ Kern, D.P.⁴ Schmidt, G.⁵ Molenkamp, L.W.⁶

15
- 12844275924
- Cross-linked polymer replica of a nanoimprint mold at 30 nm half-pitch
- DOI 10.1021/nl048618k
- H. Ge, Nano Lett. 1530-6984 5, 179 (2005). 10.1021/nl048618k (Pubitemid 40168924)
- (2005) Nano Letters , vol.5 , Issue.1 , pp. 179-182
- Ge, H.¹ Wu, W.² Li, Z.³ Jung, G.-Y.⁴ Olynick, D.⁵ Chen, Y.⁶ Liddle, J.A.⁷ Wang, S.-Y.⁸ Williams, R.S.⁹

16
- 33747774813
- Analyses of mechanical failure in nanoimprint processes
- DOI 10.1016/j.msea.2006.06.106, PII S0921509306012445
- C. H. Hsueh, S. Lee, H. -Y. Lin, L. S. Chen, and W. -H. Wang, Mater. Sci. Eng., A 0921-5093 433, 316 (2006). 10.1016/j.msea.2006.06.106 (Pubitemid 44276407)
- (2006) Materials Science and Engineering A , vol.433 , Issue.1-2 , pp. 316-322
- Hsueh, C.-H.¹ Lee, S.² Lin, H.-Y.³ Chen, L.-S.⁴ Wang, W.-H.⁵

17
- 57249086309
- 1071-1023, 10.1116/1.2987966
- C. Pina-Hernandez, P. -F. Fu, and L. J. Guo, J. Vac. Sci. Technol. B 1071-1023 26, 2426 (2008). 10.1116/1.2987966
- (2008) J. Vac. Sci. Technol. B , vol.26 , pp. 2426
- Pina-Hernandez, C.¹ Fu, P.-F.² Guo, L.J.³

18
- 36649014033
- Three-dimensional nanofabrication with elastomeric phase masks
- DOI 10.1021/jp074093j
- D. J. Shir, J. Phys. Chem. B 1089-5647 111, 12945 (2007). 10.1021/jp074093j (Pubitemid 350197617)
- (2007) Journal of Physical Chemistry B , vol.111 , Issue.45 , pp. 12945-12958
- Shir, D.J.¹ Jeon, S.² Liao, H.³ Highland, M.⁴ Cahill, D.G.⁵ Su, M.F.⁶ El-Kady, I.F.⁷ Christodoulou, C.G.⁸ Bogart, G.R.⁹ Hamza, A.V.¹⁰ Rogers, J.A.¹¹

19
- 0001466162
- 0022-3654, 10.1021/j100098a046
- S. Tasker, R. D. Chambers, and J. P. S. Badyal, J. Phys. Chem. 0022-3654 98, 12442 (1994). 10.1021/j100098a046
- (1994) J. Phys. Chem. , vol.98 , pp. 12442
- Tasker, S.¹ Chambers, R.D.² Badyal, J.P.S.³

20
- 27744439498
- Achromatic wave plates for optical pickup units fabricated by use of imprint lithography
- DOI 10.1364/OL.30.002614
- X. Deng, F. Liu, J. J. Wang, P. F. Sciortino, Jr., L. Chen, and X. Liu, Opt. Lett. 0146-9592 30, 2614 (2005). 10.1364/OL.30.002614 (Pubitemid 41609682)
- (2005) Optics Letters , vol.30 , Issue.19 , pp. 2614-2616
- Deng, X.¹ Liu, F.² Wang, J.J.³ Sciortino Jr., P.F.⁴ Chen, L.⁵ Liu, X.⁶

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.