Wide cantilever stiffness range cavity optomechanical sensors for atomic force microscopy

Optics Express

Volumn 20, Issue 16, 2012, Pages 18268-18280

  Liu, Yuxiang ^a,b   Miao, Houxun ^a,c   Aksyuk, Vladimir ^a   Srinivasan, Kartik ^a  

^a NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

^b The Institute for Research in Electronics and Applied Physics   (United States)

^c UNIVERSITY OF MARYLAND   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

NANOCANTILEVERS; SENSORS;

AFM; AFM PROBE; CANTILEVER STIFFNESS; COMPACT SENSORS; FOUR-ORDER; HIGH BANDWIDTH; HIGH QUALITY FACTORS; HIGH RESOLUTION; MECHANICAL FREQUENCY; MECHANICAL TRANSDUCERS; MICRODISK CAVITIES; NANO SCALE; NEAR-FIELD; OPTICAL READOUT; OPTO-MECHANICAL SENSORS; SINGLE CHIPS;

ATOMIC FORCE MICROSCOPY;

EID: 84864578721     PISSN: None     EISSN: 10944087     Source Type: Journal    
DOI: 10.1364/OE.20.018268     Document Type: Article

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