Electrostatic actuation of silicon optomechanical resonators

Optics Express

Volumn 19, Issue 10, 2011, Pages 9020-9026

  Sridaran, Suresh ^a   Bhave, Sunil A ^a  

^a School of Chemical and Molecular Engineering   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATOR DISKS; ELECTROSTATIC ACTUATORS; ELECTROSTATICS; MONOLITHIC INTEGRATED CIRCUITS; QUANTUM OPTICS; RESONANCE;

CAPACITIVE ACTUATION AND DETECTION; DISK RESONATOR; ELECTRICAL SIGNAL; ELECTROSTATIC ACTUATION; MECHANICAL MOTIONS; MECHANICAL-THERMAL NOISE; MICRO-ELECTRO-MECHANICAL; MICRODISKS; MONOLITHIC INTEGRATION; OPTICAL FORCE; OPTICAL INTENSITY MODULATION; OPTICAL RESONANCE; OPTICAL SENSING; OPTOMECHANICAL; OPTOMECHANICAL SYSTEMS; SENSITIVE METHOD; VIBRATIONAL MODES;

RESONATORS;

EID: 79955809631     PISSN: None     EISSN: 10944087     Source Type: Journal    
DOI: 10.1364/OE.19.009020     Document Type: Article

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