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Journal of Micromechanics and Microengineering

Volumn 22, Issue 8, 2012, Pages

Fabrication of highly ordered nanopillar arrays and defined etching of ALD-grown all-around platinum films

(5) Bethge, O a Pozzovivo, G a,d Henkel, C b Abermann, S c Bertagnolli, E a

a VIENNA UNIVERSITY OF TECHNOLOGY (Austria)

b ROYAL INSTITUTE OF TECHNOLOGY (Sweden)

c AIT AUSTRIAN INSTITUTE OF TECHNOLOGY (Austria)

d INFINEON TECHNOLOGIES AUSTRIA AG (Austria)

Author keywords

[No Author keywords available]

Indexed keywords

CRYOGENIC PROCESS; HIGHLY ORDERED ARRAYS; NANO-PILLAR ARRAYS; NANOPILLAR; NANOPILLARS; OXIDATION PROCESS; PLATINUM FILMS; SURFACE CONTAMINATIONS; VERTICALLY ALIGNED;

ASPECT RATIO; ATOMIC LAYER DEPOSITION; HYDROFLUORIC ACID; NANORODS; PHOTOELECTRONS; PLATINUM; SULFUR; SULFUR HEXAFLUORIDE; X RAY PHOTOELECTRON SPECTROSCOPY;

REACTIVE ION ETCHING;

EID: 84864467977 PISSN: 09601317 EISSN: 13616439 Source Type: Journal
DOI: 10.1088/0960-1317/22/8/085013 Document Type: Article

Times cited : (4)

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