SCOPUS 정보 검색 플랫폼

Volumn 86, Issue 2, 2007, Pages 193-196

Fabrication of high-aspect-ratio silicon nanopillar arrays with the conventional reactive ion etching technique

Author keywords

[No Author keywords available]

Indexed keywords

ANISOTROPY; ASPECT RATIO; MATERIALS SCIENCE; OPTIMIZATION; REACTIVE ION ETCHING;

ETCHING ANISOTROPY; GAS MIXTURE; SILICON PILLARS;

NANOSTRUCTURED MATERIALS;

EID: 33845291168 PISSN: 09478396 EISSN: 14320630 Source Type: Journal
DOI: 10.1007/s00339-006-3748-0 Document Type: Article

Times cited : (40)

References (16)

1
- 0035620423
- Y. Xu, H.-B. Sun, J.-Y. Ye, S. Matsuo, H. Misawa, J. Opt. Soc. Am. B 18, 1084 (2001)
- (2001) J. Opt. Soc. Am. B , vol.18 , pp. 1084
- Xu, Y.¹ Sun, H.-B.² Ye, J.-Y.³ Matsuo, S.⁴ Misawa, H.⁵

2
- 4644258174
- W. Hattori, H. Someya, M. Baba, H. Kawaura, J. Chromatogr. A 1051, 141 (2004)
- (2004) J. Chromatogr. A , vol.1051 , pp. 141
- Hattori, W.¹ Someya, H.² Baba, M.³ Kawaura, H.⁴

3
- 27844443152
- X.-M. Yan, S. Kwon, A.M. Contreras, M.M. Koebel, J. Bokor, G.A. Somorjai, Catal. Lett. 105, 127 (2005)
- (2005) Catal. Lett. , vol.105 , pp. 127
- Yan, X.-M.¹ Kwon, S.² Contreras, A.M.³ Koebel, M.M.⁴ Bokor, J.⁵ Somorjai, G.A.⁶

4
- 14944384787
- M. Callies, Y. Chen, F. Marty, A. Pein, D. Quere, Microelectron. Eng. 78-79, 100 (2005)
- (2005) Microelectron. Eng. , vol.78-79 , pp. 100
- Callies, M.¹ Chen, Y.² Marty, F.³ Pein, A.⁴ Quere, D.⁵

5
- 13444287928
- M.J. Kim, J.S. Lee, S.K. Kim, G.Y. Yeom, J.-B. Yoo, C.-Y. Park, Thin Solid Films 475, 41 (2005)
- (2005) Thin Solid Films , vol.475 , pp. 41
- Kim, M.J.¹ Lee, J.S.² Kim, S.K.³ Yeom, G.Y.⁴ Yoo, J.-B.⁵ Park, C.-Y.⁶

6
- 31144462771
- D.L. Olynick, J.A. Liddle, I.W. Rangelow, J. Vac. Sc. Technol. B 23, 2073 (2005)
- (2005) J. Vac. Sc. Technol. B , vol.23 , pp. 2073
- Olynick, D.L.¹ Liddle, J.A.² Rangelow, I.W.³

7
- 0033899653
- V. Ovchinnikov, A. Malinin, S. Novikov, C. Tuovinen, Mater. Sci. Eng. B 69-70, 459 (2000)
- (2000) Mater. Sci. Eng. B , vol.69-70 , pp. 459
- Ovchinnikov, V.¹ Malinin, A.² Novikov, S.³ Tuovinen, C.⁴

8
- 6344267073
- C.-H. Lee, T.-W. Chang, K.-L. Lee, J.-Y. Lin, J. Wang, Appl. Phys. A 79, 2027 (2004)
- (2004) J. Wang, Appl. Phys. A , vol.79 , pp. 2027
- Lee, C.-H.¹ Chang, T.-W.² Lee, K.-L.³ Lin, J.-Y.⁴

9
- 0019436775
- R. d'Agostino, D.L. Flamm, J. Appl. Phys. 52, 162 (1981)
- (1981) J. Appl. Phys. , vol.52 , pp. 162
- D'Agostino, R.¹ Flamm, D.L.²

10
- 0029326288
- R. Legtenberg, H. Jansen, M. de Boer, M. Elwenspoek, J. Electrochem. Soc. 142, 2020 (1995)
- (1995) J. Electrochem. Soc. , vol.142 , pp. 2020
- Legtenberg, R.¹ Jansen, H.² De Boer, M.³ Elwenspoek, M.⁴

11
- 3142628358
- S. Gomez, R.J. Belen, M. Kiehlbauch, E.S. Aydil, J. Vac. Sci. Technol. A 22, 606 (2004)
- (2004) J. Vac. Sci. Technol. A , vol.22 , pp. 606
- Gomez, S.¹ Belen, R.J.² Kiehlbauch, M.³ Aydil, E.S.⁴

12
- 31144461233
- R.F. Figueroa, S. Spiesshoefer, S.L. Burkett, L. Schaper, J. Vac. Sci. Technol. B 23, 2226 (2005)
- (2005) J. Vac. Sci. Technol. B , vol.23 , pp. 2226
- Figueroa, R.F.¹ Spiesshoefer, S.² Burkett, S.L.³ Schaper, L.⁴

13
- 0012578009
- T. Wells, M.M. El-Gomati, J. Wood, J. Vac. Sci. Technol. B 15, 434 (1997)
- (1997) J. Vac. Sci. Technol. B , vol.15 , pp. 434
- Wells, T.¹ El-Gomati, M.M.² Wood, J.³

14
- 0742286720
- K.R. Williams, K. Gupta, M. Wasilik, J. Microelectromech. Syst. 12, 761 (2003)
- (2003) J. Microelectromech. Syst. , vol.12 , pp. 761
- Williams, K.R.¹ Gupta, K.² Wasilik, M.³

15
- 0029325460
- H. Jansen, M. de Boer, R. Legtenberg, M. Elwenspoek, J. Micromech. Microeng. 5, 115 (1995)
- (1995) J. Micromech. Microeng. , vol.5 , pp. 115
- Jansen, H.¹ De Boer, M.² Legtenberg, R.³ Elwenspoek, M.⁴

16
- 0029253255
- H. Jansen, M. de Boer, J. Burger, R. Legtenberg, M. Elwenspoek, Microelectron. Eng. 27, 475 (1995)
- (1995) Microelectron. Eng. , vol.27 , pp. 475
- Jansen, H.¹ De Boer, M.² Burger, J.³ Legtenberg, R.⁴ Elwenspoek, M.⁵

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.