Silicide formation in contacts to Si nanowires

Journal of Materials Science

Volumn 47, Issue 17, 2012, Pages 6189-6205

  Dellas, N S ^a   Schuh, C J ^a   Mohney, S E ^a  

^a PENNSYLVANIA STATE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EARLY TRANSITION METALS; KINETIC FEATURES; LATE TRANSITION METALS; METAL FILM; METAL OXIDE SEMICONDUCTOR; NANOWIRE DEVICES; NI-SI SYSTEM; SI NANOWIRE; SI WAFER; SILICIDE FORMATION;

MOS DEVICES; NANOWIRES; PALLADIUM; PLATINUM; SILICIDES; SILICON; TRANSITION METALS;

SILICON WAFERS;

EID: 84864455935     PISSN: 00222461     EISSN: 15734803     Source Type: Journal    
DOI: 10.1007/s10853-012-6549-1     Document Type: Review

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