Imaging the surface stress and vibration modes of a microcantilever by laser beam deflection microscopy

Nanotechnology

Volumn 23, Issue 31, 2012, Pages

  Tamayo, Javier ^a   Pini, Valerio ^a   Kosaka, Prisicila ^a   Martinez, Nicolas F ^b   Ahumada, Oscar ^b   Calleja, Montserrat ^a  

^a INSTITUTO DE MICROELECTRÓNICA DE MADRID   (Spain)

^b MecWins   (Spain)

Author keywords

[No Author keywords available]

Indexed keywords

BEAM DEFLECTION; FINITE ELEMENT SIMULATIONS; LASER BEAM DEFLECTION; LASER SPOT SIZE; LATERAL RESOLUTION; MICRO-CANTILEVERS; MULTI-FREQUENCY EXCITATION; NANOMECHANICAL SYSTEMS; NONINVASIVE TECHNIQUE; NOVEL TECHNIQUES; OUT-OF-PLANE DISPLACEMENT; OUT-OF-PLANE RESOLUTION; SCANNING LASERS; SEMICONDUCTOR INDUSTRY; SIMULTANEOUS IMAGING; SPATIAL RESOLUTION; SURFACE STRESS; VIBRATION BEHAVIOR; VIBRATION MODES;

LASER EXCITATION; SCANNING PROBE MICROSCOPY; SEMICONDUCTOR DEVICE MANUFACTURE; SOLID STATE LASERS; SURFACE PROPERTIES;

COMPOSITE MICROMECHANICS;

ARTICLE; CONFOCAL MICROSCOPY; ELECTROCHEMISTRY; FINITE ELEMENT ANALYSIS; GENETIC PROCEDURES; INSTRUMENTATION; LASER; METHODOLOGY; NANOTECHNOLOGY; RADIATION EXPOSURE; SCANNING PROBE MICROSCOPY; SEMICONDUCTOR; SURFACE PROPERTY; VIBRATION;

BIOSENSING TECHNIQUES; ELECTROCHEMISTRY; FINITE ELEMENT ANALYSIS; LASERS; MICROSCOPY, CONFOCAL; MICROSCOPY, SCANNING PROBE; NANOTECHNOLOGY; SEMICONDUCTORS; SURFACE PROPERTIES; VIBRATION;

EID: 84863962806     PISSN: 09574484     EISSN: 13616528     Source Type: Journal    
DOI: 10.1088/0957-4484/23/31/315501     Document Type: Article

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