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Volumn 82, Issue 7, 2011, Pages
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High speed two-dimensional optical beam position detector
a
Maypa BV
(Netherlands)
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Author keywords
[No Author keywords available]
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Indexed keywords
CONVENTIONAL DETECTORS;
ELECTRONIC PROCESSING;
OPERATION PRINCIPLES;
OPTICAL BEAMS;
OPTICAL SPOTS;
QUADRANT PHOTODIODE DETECTORS;
SCANNING PROBE DATA STORAGE;
SPATIAL ACCURACY;
SPATIAL SENSITIVITY;
WAVE-FRONT SENSING;
WIDE-BAND;
ATOMIC FORCE MICROSCOPY;
BANDWIDTH;
FREQUENCY RESPONSE;
PHOTODIODES;
POSITION MEASUREMENT;
TWO DIMENSIONAL;
DETECTORS;
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EID: 79961135429
PISSN: 00346748
EISSN: None
Source Type: Journal
DOI: 10.1063/1.3608506 Document Type: Article |
Times cited : (15)
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References (16)
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