Conformality of ceramic oxygen barrier coatings on microand nanoscale features by pulsed-pressure MOCVD

Journal of the Australian Ceramic Society

Volumn 48, Issue 1, 2012, Pages 69-79

  Krumdieck, Susan ^a  

^a UNIVERSITY OF CANTERBURY   (New Zealand)

Author keywords

Ceramic coatings; Conformality; Metalorganic chemical vapor deposition; Pulsed pressure MOCVD

Indexed keywords

3-D SHAPE; A-CERAMICS; ARRIVAL RATES; CARRIER GAS; COATING LAYER; COMPLEX SHAPES; CONFORMALITY; CRITICAL ISSUES; FLOW EFFECTS; HYPERSONIC FLIGHTS; LARGE OBJECTS; NANOSCALE FEATURES; NEW MODEL; OXIDATION BARRIER; OXYGEN BARRIER COATING; PROCESSING METHOD; REACTOR DESIGNS; SCALE-UP; SEM IMAGE; SILICON CARBIDE COMPOSITES; TARGET STRUCTURAL MATERIALS; THERMALLY DRIVEN;

CERAMIC COATINGS; CERAMIC MATERIALS; HYPERSONIC AERODYNAMICS; HYPERSONIC VEHICLES; METALLORGANIC CHEMICAL VAPOR DEPOSITION; SILICON CARBIDE; THROUGHPUT; VAPORS;

THREE DIMENSIONAL;

EID: 84863304853     PISSN: 0004881X     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

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