Experimental characterization and modeling of pulsed MOCVD with ultrasonic atomization of liquid precursor

Chemical Vapor Deposition

Volumn 7, Issue 2, 2001, Pages 85-90

  Krumdieck, Susan P ^a,b   Raj, Rishi ^a  

^a UCB 450   (United States)

^b UNIVERSITY OF CANTERBURY   (New Zealand)

Author keywords

Microstructure; MOCVD; Precursor delivery system; Titanium isopropoxide

Indexed keywords

EID: 0002979766     PISSN: 09481907     EISSN: None     Source Type: Journal    
DOI: 10.1002/1521-3862(200103)7:2<85::AID-CVDE85>3.0.CO;2-9     Document Type: Article

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