Study on the in-line sputtering growth and structural properties of polycrystalline ZnO:Al on ZnO and glass

Journal of Crystal Growth

Volumn 344, Issue 1, 2012, Pages 12-18

  Owen, Jorj I ^a   Zhang, Wendi ^a   Köhl, Dominik ^b   Hüpkes, Jürgen ^a  

^a FORSCHUNGSZENTRUM JÜLICH   (Germany)

^b RWTH AACHEN UNIVERSITY   (Germany)

Author keywords

A1. Etching; A1. Growth models; A3. Sputtering; B2. ZnO; B3. Solar cells

Indexed keywords

A1. GROWTH MODELS; ALUMINUM-DOPED ZINC OXIDE; C-AXIS ORIENTATIONS; ETCHING CHARACTERISTICS; GROWTH MODELS; IN-LINE; LIGHT TRAPPING STRUCTURES; POLYCRYSTALLINE ZNO; SPUTTERING CONDITIONS; SPUTTERING GROWTH; THIN-FILM SILICON SOLAR CELLS; TOPOGRAPHICAL FEATURES; VARIOUS SUBSTRATES; ZNO; ZNO SINGLE CRYSTALS; ZNO:AL FILMS;

ALUMINUM; ETCHING; GLASS;

ZINC OXIDE;

EID: 84862831580     PISSN: 00220248     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jcrysgro.2012.01.043     Document Type: Article

References (27)

1. B. Rech, and H. Wagner Applied Physics A: Materials Science and Processing 69 1999 155 167
2. M. Berginski, J. Hüpkes, M. Schulte, G. Schöpe, H. Stiebig, B. Rech, and M. Wuttig Journal of Applied Physics 101 2007 074903
3. O. Kluth, G. Schöpe, J. Hüpkes, C. Agashe, J. Müller, and B. Rech Thin Solid Films 442 2003 80 85
4. Y.H. Kim, K.S. Lee, T.S. Lee, B.-K. Cheong, T.-Y. Seong, and W.M. Kim Current Applied Physics 10 2010 S278 S281
5. D.-W. Kang, S.-H. Kuk, K.-S. Ji, S.-W. Ahn, and M.-K. Han Physica Status Solidi C 7 2010 925 928
6. X. Jiang, C.L. Jia, and R.J. Hong Journal of Crystal Growth 289 2006 464 471
7. A.N. Mariano, and R.E. Hanneman Journal of Applied Physics 34 1963 384
8. H.C. Gatos Journal of Applied Physics 32 1961 1232 1234
9. K. Ellmer, in: Materials Research Society Symposium Proceedings, Boston, Massachusetts, 2008, p. 1109-B07-05.
10. T. Minegishi, J. Yoo, H. Suzuki, Z. Vashaei, K. Inaba, K. Shim, and T. Yao Journal of Vacuum Science and Technology B 23 2005 1286
11. I. Ohkubo, A. Ohtomo, T. Ohnishi, Y. Mastumoto, H. Koinuma, and M. Kawasaki Surface Science 443 1999 L1043 L1048
12. H. Xu, K. Ohtani, M. Yamao, and H. Ohno Applied Physics Letters 89 2006 071918
13. J.I. Owen, J. Hüpkes, E. Bunte, in: Materials Research Society Symposium Proceedings, San Francisco, CA, 2009, p. 1153-A07-08.
14. O. Kluth, C. Zahren, H. Stiebig, B. Rech, H. Schade, in: Proceedings of the 19th European Photovoltaic Solar Energy Conference, Paris, France, 2004, pp. 15871590.
15. Y.E. Lee, S.G. Kim, Y.J. Kim, and H.J. Kim Journal of Vacuum Science and Technology A 15 1997 1194
16. P. Kuppusami, G. Vollweiler, D. Rafaja, and K. Ellmer Applied Physics A 80 2004 183 186
17. H. Kato, M. Sano, K. Miyamoto, and T. Yao Journal of Crystal Growth 265 2004 375 381
18. O. Isabella, F. Moll, J. Krc, and M. Zeman Physica Status Solidi A 207 2010 642 646
19. J.I. Owen, J. Hüpkes, E. Bunte, S.E. Pust, A. Gordijn, in: Proceedings of the 25th European Photovoltaic Solar Energy Conference, Valencia, Spain, 2010, pp. 29512955.
20. T. Minegishi, A. Ishizawa, J. Kim, D. Kim, S. Ahn, S. Park, J. Park, I. Im, D.C. Oh, H. Nakano, K. Fujii, H. Jeon, and T. Yao Journal of Vacuum Science and Technology B 26 2008 1120
21. W. Jo, S.-J. Kim, and D.-Y. Kim Acta Materialia 53 2005 4185 4188
22. W. Zhang, E. Bunte, M. Luysberg, P. Spiekermann, F. Ruske, and J. Hüpkes Surface and Coatings Technology 205 2011 S223 S228
23. T. Yamamoto, T. Shiosaki, and A. Kawabata Journal of Applied Physics 51 1980 3113
24. F.S. Hickernell, T.S. Hickenell, in: Proceedings of the IEEE Ultrasonics Symposium, Tucson, AZ, 1992, pp. 373376.
25. F.S. Hickernell Revue De Physique Appliquée 20 1985 6
26. X. Wang, Y. Tomita, O.-H. Roh, M. Ohsugi, S.-B. Che, Y. Ishitani, and A. Yoshikawa Applied Physics Letters 86 2005 011921
27. A. van der Drift Philips Research Reports 22 1967 267 288