SCOPUS 정보 검색 플랫폼

Semiconductor Science and Technology

Volumn 27, Issue 8, 2012, Pages

Frequency-dependent dielectric response of HfTaO x-based metalinsulatormetal capacitors

(3) Hota, M K a,b Sarkar, C K b Maiti, C K a

a INDIAN INSTITUTE OF TECHNOLOGY (India)

b JADAVPUR UNIVERSITY (India)

Author keywords

[No Author keywords available]

Indexed keywords

AC CONDUCTIVITY; BOTTOM ELECTRODES; CONDUCTION MECHANISM; DIELECTRIC LAYER; DIELECTRIC RESPONSE; DIFFERENT THICKNESS; FREQUENCY DEPENDENCE; FREQUENCY-DEPENDENT; HIGH-CAPACITANCE DENSITY; LOSS TANGENT;

PLATINUM;

ELECTROLYTIC CAPACITORS;

EID: 84862183557 PISSN: 02681242 EISSN: 13616641 Source Type: Journal
DOI: 10.1088/0268-1242/27/8/085002 Document Type: Article

Times cited : (10)

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