Mechanism of leakage current reduction of tantalum oxide capacitors by titanium doping

Applied Physics Letters

Volumn 90, Issue 11, 2007, Pages

  Lau, W S ^a   Tan, T S ^a   Babu, Premila ^a   Sandler, Nathan P ^b  

^a NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

^b LAM RESEARCH CORPORATION   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DOPING (ADDITIVES); LEAKAGE CURRENTS; LOW TEMPERATURE EFFECTS; OXYGEN VACANCIES; TANTALUM COMPOUNDS; TITANIUM;

DONORS; LEAKAGE CURRENT REDUCTION; TANTALUM OXIDES;

CAPACITORS;

EID: 33947311074     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2710000     Document Type: Article

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