The evolution of ion charge states in cathodic vacuum arc plasmas: A review

Plasma Sources Science and Technology

Volumn 21, Issue 3, 2012, Pages

  Anders, André ^a  

^a LAWRENCE BERKELEY NATIONAL LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CATHODE MATERIALS; CATHODIC VACUUM ARCS; CHARGE EXCHANGE COLLISION; CHARGE STATE DISTRIBUTION; COMPLEX IMAGE; EXTERNAL MAGNETIC FIELD; FRACTAL MODEL; IN-VACUUM; ION CHARGE STATE; MULTIPLY CHARGED IONS; NONIDEAL PLASMA; PRESSURE IONIZATION; SCIENCE AND TECHNOLOGY; VACUUM ARC PLASMA;

CATHODES; ION SOURCES; IONIZATION; MAGNETIC FIELDS; PHASE DIAGRAMS; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; VACUUM APPLICATIONS; VAPORS;

VACUUM TECHNOLOGY;

EID: 84862164066     PISSN: 09630252     EISSN: 13616595     Source Type: Journal    
DOI: 10.1088/0963-0252/21/3/035014     Document Type: Review

References (141)

1. Hantzsche E 2003 Mysteries of the arc cathode spot: A retrospective glance IEEE Trans. Plasma Sci. 31 799808
2. Dushman S 1930 Thermionic emission Rev. Mod. Phys. 2 381476
3. Fowler R H and Nordheim L 1928 Electron emission in intense electric fields Proc. R. Soc. (London) A 119 17381
4. Murphy E L and Good R H Jr 1956 Thermionic emission, field emission, and the transition region Phys. Rev. 102 1446
5. Litvinov E A, Mesyats G A and Proskurovskii D I 1983 Field emission and explosive emission processes in vacuum discharges Sov. Phys. - Usp. 26 138
6. Anders A 2008 Cathodic Arcs: From Fractal Spots to Energetic Condensation (New York: Springer)
7. Anders A, Anders S, Förster A and Brown I G 1992 Pressure ionization: its role in metal vapor vacuum arc plasmas and ion sources Plasma Sources Sci. Technol. 1 26370
8. Djakov B E and Holmes R 1971 Cathode spot division in vacuum arcs with solid metal cathodes J. Phys. D: Appl. Phys. 4 5049
9. Jüttner B 1999 Nanosecond displacement times of arc cathode spots in vacuum IEEE Trans. Plasma Sci. 27 83644 (Pubitemid 30508451)
10. Anders S and Anders A 1988 Frozen state of ionization in a cathodic plasma jet of a vacuum arc J. Phys. D: Appl. Phys. 21 2135 (Pubitemid 18561865)
11. Anders A and Yushkov G Y 2002 Ion flux from vacuum arc cathode spots in the absence and presence of magnetic fields J. Appl. Phys. 91 482432 (Pubitemid 34598933)
12. Ivanov V A, Jüttner B and Pursch H 1985 Time-resolved measurements of the parameters of arc cathode plasmas in vacuum IEEE Trans. Plasma Sci. 13 3346
13. Biberman L M, Vorobev V S and Yakubov I T 1987 Kinetics of the Nonequilibrium Low-Temperature Plasma (Berlin: Springer)
14. Anders A 1997 Ion charge state distributions of vacuum arc plasmas: The origin of species Phys. Rev. E 55 96981 (Pubitemid 127736186)
15. Brown I G 1994 Vacuum arc ion sources Rev. Sci. Instrum. 65 306181
16. Anders A 1999 Plasma fluctuations, local partial Saha equilibrium, and the broadening of vacuum-arc ion charge state distributions IEEE Trans. Plasma Sci. 27 10607 (Pubitemid 30508486)
17. Anders A 2005 The fractal nature of cathode spots IEEE Trans. Plasma Sci. 33 145664 (Pubitemid 41576513)
18. Mandelbrot B B 1983 The Fractal Geometry of Nature (New York: Freeman)
19. Schroeder M 2000 Fractals, Chaos, Power Laws: Minutes from an Infinite Paradise 8th edn (New York: Freeman)
20. Anders A, Oks E M and Yushkov G Yu 2005 Cathodic arcs: fractal voltage and cohesive energy rule Appl. Phys. Lett. 86 211503 (Pubitemid 40861500)
21. Ryves L, McKenzie D R and Bilek M M M 2009 Cathode-spot dynamics in a high-current pulsed arc: a noise study IEEE Trans. Plasma Sci. 37 3658
22. Anders A, Anders S, Jüttner B, Pursch H, Bötticher W and Lück H 1992 Vacuum arc cathode spot parameters from high-resolution luminosity measurements J. Appl. Phys. 71 476370
23. Anders S, Anders A and Jüttner B 1992 Brightness distribution and current density of vacuum arc cathode spots J. Phys. D: Appl. Phys. 25 15919 (Pubitemid 23614705)
24. Siemroth P, Schülke T and Witke T 1997 Investigations of cathode spots and plasma formation of vacuum arcs by high speed microscopy and spectrography IEEE Trans. Plasma Sci. 25 5719 (Pubitemid 127828140)
25. Anders A 1990 Verfahren zur Beurteilung von Elektroden in Hochdruckentladungslampen. (Procedure of evaluating electrodes in high pressure discharge lamps), German Democratic Republic Patent DD 279 977 A1.
26. Schülke T and Siemroth P 1996 Vacuum arcs cathode spots as a self-similarity phenomenon IEEE Trans. Plasma Sci. 24 634 (Pubitemid 126776072)
27. Daalder J E 1983 Random walk of cathode arc spots in vacuum J. Phys. D: Appl. Phys. 16 1727 (Pubitemid 13493917)
28. Hantzsche E, Jüttner B and Pursch H 1983 On the random walk of arc cathode spots in vacuum J. Phys. D: Appl. Phys. 16 L1739
29. Jüttner B 1995 The dynamics of arc cathode spots in vacuum J. Phys. D: Appl. Phys. 28 51622
30. Jüttner B and Kleberg I 2000 The retrograde motion of arc cathode spots in vacuum J. Phys. D: Appl. Phys. 33 202536
31. Tanberg R 1929 Motion of an electric arc in a magnetic field under low gas pressure Nature 124 3712
32. Kajita S, Ohno N, Tsuji Y, Tanaka H and Takamura S 2010 Self-affine fractality of bifurcating arc trail in magnetized plasma J. Phys. Soc. Japan 79 054501
33. Puchkarev V F and Murzakayev A M 1990 Current density and the cathode spot lifetime in a vacuum arc at threshold currents J. Phys. D: Appl. Phys. 23 2635 (Pubitemid 20637965)
34. Secker P E and George I A 1969 Preliminary measurements of arc cathode current density J. Phys. D: Appl. Phys. 2 91820
35. Jüttner B, Pursch H and Anders S 1984 On the current density at the cathode of vacuum arcs J. Phys. D: Appl. Phys. 17 L1114
36. Cobine J D and Gallagher C J 1948 Current density of the arc cathode spot Phys. Rev. 74 152430
37. Hantzsche E and Jüttner B 1985 Current density in arc spots IEEE Trans. Plasma Sci. 13 2304
38. Vogel N and Jüttner B 1991 Measurements of the current density in arc cathode spots from the Zeeman splitting of emission lines J. Phys. D: Appl. Phys. 24 9227 (Pubitemid 21668774)
39. Beilis I I 2001 State of the theory of vacuum arcs IEEE Trans. Plasma Sci. 29 65770 (Pubitemid 33137805)
40. Chace W G and More H K 1962 Exploding Wires (New York: Plenum)
41. Mesyats G A 1995 Ecton mechanism of the vacuum arc cathode spot IEEE Trans. Plasma Sci. 23 87983
42. Mesyats G A 1998 Explosive Electron Emission (Ekaterinburg: URO Press)
43. Barengolts S A, Mesyats G A and Shmelev D L 2003 Structure and time behavior of vacuum arc cathode spots IEEE Trans. Plasma Sci. 31 80916
44. Mesyats G A and Barengolts S A 2001 The cathode spot of a high-current vacuum arc as a multiecton phenomenon IEEE Trans. Plasma Sci. 29 7047 (Pubitemid 33137812)
45. Hantzsche E, Jüttner B and Ziegenhagen G 1995 Why vacuum arc cathode spots can appear larger than they are IEEE Trans. Plasma Sci. 23 5564
46. Anders A, Anders S, Jüttner B, Bötticher W, Lück H and Schröder G 1992 Pulsed dye laser diagnostics of vacuum arc cathode spots IEEE Trans. Plasma Sci. 20 46672 (Pubitemid 23586082)
47. Anders A, Anders S, Jüttner B and Lück H 1996 High-resolution imaging of vacuum arc cathode spots IEEE Trans. Plasma Sci. 24 6970 (Pubitemid 126776075)
48. Vogel N and Skvortsov V A 1997 Plasma parameters within the cathode spot of laser-induced vacuum arcs: experimental and theoretical investigations IEEE Trans. Plasma Sci. 25 55363 (Pubitemid 127828138)
49. Batrakov A, Vogel N, Popov S E, Proskurovsky D, Kudimov D and Nikitine D 2002 Interferograms of a cathode spot plasma obtained with a picosecond laser IEEE Trans. Plasma Sci. 30 1067 (Pubitemid 34719684)
50. Batrakov A, Popov S, Vogel N, Jüttner B and Proskurovsky D I 2003 Plasma parameters of an arc cathode spot at the low-current vacuum discharge IEEE Trans. Plasma Sci. 31 81726
51. Kesaev I G 1968 Cathode Processes of an Electric Arc (Moscow: Nauka) (in Russian)
52. Arapov S S and Volkov N B 2003 The formation and structure of current cells in a vacuum arc cathode spot Tech. Phys. Lett. 29 14 (Pubitemid 36195259)
53. Jüttner B 2001 Cathode spots of electrical arcs (Topical Review) J. Phys. D: Appl. Phys. 34 R10323
54. Child C D 1911 Discharge from hot CaO Phys. Rev. 32 492511
55. Smith R C, Forrest R D, Carey J D, Hsu W K and Silva S R P 2005 Interpretation of enhancement factor in nonplanar field emitters Appl. Phys. Lett. 87 013111 (Pubitemid 41227755)
56. Forbes R G, Edgcombe C J and Valdrè U 2003 Some comments on models for field enhancement Ultramicroscopy 95 5765 (Pubitemid 36132144)
57. Seelaboyina R, Huang J, Park J, Kang D H and Choi W B 2006 Multistage field enhancement of tungsten oxide nanowires and its field emission in various vacuum conditions Nanotechnology 17 4840 (Pubitemid 44424626)
58. Hantzsche E 1997 Arc spot ignition caused by sheath instability IEEE Trans. Plasma Sci. 25 52732 (Pubitemid 127828133)
59. Robson A E and Thonemann P C 1959 An arc maintained on an isolated metal plate exposed to a plasma Proc. Phys. Soc. 73 50812
60. Schwirzke F 1984 Unipolar arc model J. Nucl. Mater. 128129 60912 (Pubitemid 15450712)
61. Barengolts S A, Mesyats G A and Tsventoukh M M 2010 The ecton mechanism of unipolar arcing in magnetic confinement fusion devices Nucl. Fusion 50 125004
62. Hantzsche E 1980 Unipolarbögen Beitr. Plasmaphys. 20 32942
63. Kajita S, Takamura S and Ohno N 2009 Prompt ignition of a unipolar arc on helium irradiated tungsten Nucl. Fusion 49 032002
64. Tokitani M et al 2011 Exfoliation of the tungsten fibreform nanostructure by unipolar arcing in the LHD divertor plasma Nucl. Fusion 51 102001
65. Kajita S, Takamura S and Ohno N 2011 Motion of unipolar arc spots ignited on a nanostructured tungsten surface Plasma Phys. Control. Fusion 53 074002
66. Brown I G, Feinberg B and Galvin J E 1988 Multiply stripped ion generation in the metal vapor vacuum arc J. Appl. Phys. 63 488998
67. Anders A 2002 Cohesive energy rule for vacuum arcs in Emerging Applications of Vacuum-Arc-Produced Plasma, Ion and Electron Beams ed I Brown and E Oks (Dordrecht: Kluwer) pp 114
68. Cobine J D 1938 Effects of oxides and impurities on metallic arc reignition Phys. Rev. 53 911
69. Djakov B E and Holmes R 1974 Cathode spot structure and dynamcis in low-current vacuum arcs J. Phys. D: Appl. Phys. 7 56980
70. Jüttner B 1979 Erosion craters and arc cathode spots Beitr. Plasmaphys. 19 2548
71. Jakubka K and Jüttner B 1980 The influence of surface conditions on the initiation, propagation and current density of unipolar arcs in fusion devices J. Nucl. Mater. 102 25966 (Pubitemid 12513462)
72. Proskurovsky D I and Puchkarev V F 1979 Formation of new emission centers on a cathode during current switching in vacuum. Formation of new emission centers Sov. Phys. - Tech. Phys. 24 14748 (Pubitemid 11465057)
73. Beilis I I 2002 Vacuum arc cathode spot grouping and motion in magnetic fields IEEE Trans. Plasma Sci. 30 212432
74. Yushkov G Y and Anders A 1998 Effect of the pulse repetition rate on the composition and ion charge-state distribution of pulsed vacuum arcs IEEE Trans. Plasma Sci. 26 2206 (Pubitemid 128741293)
75. Sasaki J and Brown I G 1989 Ion spectra of vacuum arc plasma with compound and alloy cathodes J. Appl. Phys. 66 5198203
76. Sasaki J, Sugiyama K, Yao X and Brown I 1993 Multiple-species ion beams from titaniumhafnium alloy cathodes in vacuum arc plasmas J. Appl. Phys. 73 71847
77. Schülke T and Anders A 1999 Ion charge state distributions of alloy-cathode vacuum arc plasmas IEEE Trans. Plasma Sci. 27 9114 (Pubitemid 30508463)
78. Savkin K P, Yushkov Y G, Nikolaev A G, Oks E M and Yushkov G Y 2010 Generation of multicomponent ion beams by a vacuum arc ion source with compound cathode Rev. Sci. Instrum. 81 02A501-3
79. Anders A, Yushkov G, Oks E, Nikolaev A and Brown I 1998 Ion charge state distributions of pulsed vacuum arc plasmas in strong magnetic fields Rev. Sci. Instrum. 69 13325 (Pubitemid 128579293)
80. Ehiasarian A P, Hovsepian P E, New R and Valter J 2004 Influence of steering magnetic field on the time-resolved plasma chemistry in cathodic arc discharges J. Phys. D: Appl. Phys. 37 21016
81. Krinberg I A 2003 On the mechanism of the external magnetic field action on the electron temperature and ion charge state distribution in a vacuum arc plasma Tech. Phys. Lett. 29 5046 (Pubitemid 36931909)
82. Oks E, Brown I G, Dickinson M R, MacGill R A, Spädtke P, Emig H and Wolf B H 1995 Elevated ion charge states in vacuum arc plasmas in a magnetic field Appl. Phys. Lett. 67 2002
83. Oks E M, Anders A, Brown I G, Dickinson M R and MacGill R A 1996 Ion charge state distributions in high current vacuum arc plasma in a magnetic field IEEE Trans. Plasma Sci. 24 117483 (Pubitemid 126771229)
84. Oks E and Anders A 2011 Measurements of the ion species of cathodic arc plasma in an axial magnetic field IEEE Trans. Plasma Sci. 39 12726
85. Paoloni F J and Brown I G 1995 Some observations of the effect of magnetic field and arc current on the vacuum arc charge state distribution Rev. Sci. Instrum. 66 38558
86. Rosén J, Anders A and Schneider J M 2002 Plasma chemistry fluctuations in a reactive arc plasma in the presence of magnetic fields Appl. Phys. Lett. 80 410911 (Pubitemid 34690710)
87. Rosén J, Anders A, Mráz S and Schneider J M 2005 Charge-state-resolved ion energy distributions of aluminum vacuum arcs in the absence and presence of a magnetic field J. Appl. Phys. 97 103306-1-6 (Pubitemid 40866036)
88. Anders A 1999 Approaches to rid cathodic arc plasma of macro- and nanoparticles: a review Surf. Coat. Technol. 120121 31930
89. Anders A 2002 Imaging the separation of cathodic arc plasma and macroparticles in curved magnetic filters IEEE Trans. Plasma Sci. 30 1089 (Pubitemid 34719685)
90. Plyutto A A, Ryzhkov V N and Kapin A T 1965 High speed plasma streams in vacuum arcs Sov. Phys. - JETP 20 32837
91. Davis W D and Miller H C 1969 Analysis of the electrode products emitted by dc arcs in a vacuum ambient J. Appl. Phys. 40 221221
92. Lunev V M, Padalka V G and Khoroshikh V M 1977 Plasma properties of a metal vacuum arc. II Sov. Phys. - Tech. Phys. 22 85861 (Pubitemid 8612216)
93. Daalder J E 1976 Components of cathode erosion in vacuum arcs J. Phys. D: Appl. Phys. 9 237995
94. Brown I G, Spädtke P, Rück D M and Wolf B H 1990 Beam intensity fluctuation characteristrics of the metal vapor vacuum arc ion source Nucl. Instrum. Methods Phys. Res. A 295 1220
95. Anders A, Anders S, Jüttner B and Brown I G 1993 Time dependence of vacuum arc parameters IEEE Trans. Plasma Sci. PS-21 30511 (Pubitemid 23697371)
96. Miller H C 1989 Cathode ions from microsecond aluminum vacuum arcs J. Appl. Phys. 66 110712
97. Galvin J E, Brown I G and MacGill R A 1990 Charge state distribution studies of the metal vapor vacuum arc ion source Rev. Sci. Instrum. 61 5835
98. Sangines R, Israel A M, Falconer I S, McKenzie D R and Bilek M M M 2010 Production of highly ionized species in high-current pulsed cathodic arcs Appl. Phys. Lett. 96 221501-3
99. Anders A 2005 Time-dependence of ion charge state distributions of vacuum arcs: An interpretation involving atoms and charge exchange collisions IEEE Trans. Plasma Sci. 33 2059 (Pubitemid 40337273)
100. Anders A, Oks E M, Yushkov G Y, Savkin K P, Brown I G and Nikolaev A G 2005 Measurements of the total ion flux from vacuum arc cathode spots IEEE Trans. Plasma Sci. 33 15326 (Pubitemid 41576524)
101. Anders A and Yushkov G Y 2007 Puzzling differences in bismuth and lead plasmas: evidence for the significant role of neutrals in cathodic vacuum arcs Appl. Phys. Lett. 91 091502 (Pubitemid 47352260)
102. Anders A, Oks E M and Yushkov G Y 2007 Production of neutrals and their effects on the ion charge states in cathodic vacuum arc plasmas J. Appl. Phys. 102 043303 (Pubitemid 47353977)
103. Rosén J, Anders A, Hultman L and Schneider J M 2004 Charge state and time resolved plasma composition of a pulsed zirconium arc in a nitrogen environment J. Appl. Phys. 96 47939
104. Schneider J M, Anders A, Brown I G, Hjörvarsson B and Hultman L 1999 Temporal development of the plasma composition of a pulsed aluminum plasma stream in the presence of oxygen Appl. Phys. Lett. 75 6124 (Pubitemid 129562001)
105. Daalder J E 1975 Erosion and the origin of charged and neutral species in vacuum arcs J. Phys. D: Appl. Phys. 8 164759
106. Tarrant R N, Bilek M M M, Pigott J and McKenzie D R 2004 Plasma transport and optical flares in high-density plasmas produced from a pulsed cathodic arc Surf. Coat. Technol. 186 1016 (Pubitemid 40564050)
107. Ni P A and Anders A 2010 Supersonic metal plasma impact on a surface: an optical investigation of the pre-surface region J. Phys. D: Appl. Phys. 43 135201
108. Wu H and Anders A 2010 Energetic deposition of metal ions: Observation of self-sputtering and limited sticking for off-normal angles of incidence J. Phys D: Appl. Phys. 43 065206
109. Popov S A, Batrakov A V, Methling R, Uhrlandt D and Weltmann K-D 2009 Spectroscopic study of a single vacuum-arc cathode spot IEEE Trans. Plasma Sci. 37 141925
110. Aksenov I I, Antufev Yu P, Bren V G, Padalka V G, Popov A I and Khoroshikh V M 1981 Effect of electron magnetization in vacuum-arc plasma on the kinetics of the synthesis of nitrogen-containing coatings Sov. Phys. - Tech. Phys. 26 1847 (Pubitemid 12462540)
111. Coll B F, Fontana R, Gates A and Sathrum P 1991 (TiAl)N advanced films prepared by arc process Mater. Sci. Eng. A 140 81624 (Pubitemid 21709872)
112. Zhitomirsky V N, Kinrot U, Alterkop B, Boxman R L and Goldsmith S 1996 Influence of gas pressure on the ion current and its distribution in a filtered vacuum arc deposition system Surf. Coat. Technol. 87-8 26370 (Pubitemid 126405944)
113. Sjolen J, Karlsson L, Braun S, Murdey R, Horling A and Hultman L 2007 Structure and mechanical properties of arc evaporated TiAlON thin films Surf. Coat. Technol. 201 6392403 (Pubitemid 46275953)
114. Puchert M K, Davis C A, McKenzie D R and James B W 1992 Gas-plasma interactions in a filtered cathodic arc J. Vac. Sci. Technol. A 10 34938
115. Spädtke P, Emig H, Wolf B H and Oks E 1994 Influence of gas added to the MEVVA discharge on the extracted ion beam Rev. Sci. Instrum. 65 31138
116. Nikolaev A G, Oks E M and Yushkov G Y 1998 Effect of residual gas on the ion charge distribution in vacuum arc discharge plasmas Zh. Tekh. Fiz. 68 248
117. Kelly H, Lepone A and Marquez A 2001 Characterization of plasma-gas interactions in a copper cathodic arc operated in oxygen J. Appl. Phys. 89 156772 (Pubitemid 33629970)
118. Lepone A, Kelly H and Marquez A 2001 Role of metallic neutrals and gaseous molecular ions in a copper cathodic arc operated with oxygen gas J. Appl. Phys. 90 317481
119. Negus C R and Peacock N J 1979 Local regions of high-pressure plasma in a vacuum spark J. Phys. D: Appl. Phys. 12 91111 (Pubitemid 9423476)
120. Beier R and Kunze H-J 1978 Observation of line radiation from highly charged Mo ions in a vacuum spark plasma Z. Phys. A 285 34752
121. Hebach M et al 1993 Time Evolution of the X-ray Emission from a micropinch in a vacuum spark discharge Europhys. Lett. 21 311
122. Plyutto A A, Kervalidze K N and Kvartskhava I F 1957 Spark source for multiply-charged ions At. Energy 3 9258
123. Yushkov G Y and Anders A 2008 Extractable, elevated ion charge states in the transition regime from vacuum sparks to high current vacuum arcs Appl. Phys. Lett. 92 041502 (Pubitemid 351198805)
124. Yushkov G Y and Anders A 2009 Physical limits for high ion charge states in pulsed discharges in vacuum J. Appl. Phys. 105 043303
125. Anders A 2001 A periodic table of ion charge-state distributions observed in the transition region between vacuum sparks and vacuum arcs IEEE Trans. Plasma Sci. 29 3938 (Pubitemid 32514160)
126. Johnson B M, Hershcovitch A, Brown I G, Liu F and Anders A 1997 Results from z-Mevva: A new source for heavy-ion accelerators IEEE Particle Accelerator Conf. (Vancouver, BC)
127. Hershcovitch A, Johnson B M, Liu F, Anders A and Brown I G 1998 Results from energetic electron beam metal vapor vacuum arc and z-discharge plasma metal vapor arc: development of new sources of intense high charge state heavy-ion beams Rev. Sci. Instrum. 69 798800
128. Debolt N, Hershcovitch A, Johnson B M, Rostoker N, VanDrie A and Wessel F 2002 Recent results from the low inductance Z-discharge metal vapor ion source Rev. Sci. Instrum. 73 7413 (Pubitemid 34192638)
129. Bugaev A S, Gushenets V I, Yushkov G Y, Oks E M, Anders A, Brown I, Hershkovitch A and Spaedtke P 2001 Generation of multiply charged ions in vacuum arc discharges (in Russian) Russian Phys. J. 44 91220 Izv. Vys. Ucheb. Zav. (Fizika) 44 1522 (Engl. transl. 2001) (Pubitemid 33810364)
130. Bugaev A, Gushenets V, Yushkov G, Oks E, Kulevoy T, Hershcovitch A and Johnson B M 2001 Electron-beam enhancement of ion charge state fractions in the metal-vapor vacuum-arc ion source Appl. Phys. Lett. 79 91921
131. Batalin V A et al 2002 Electron-beam enhancement of the metal vapor vacuum arc ion source J. Appl. Phys. 92 28849 (Pubitemid 35037909)
132. Vodopyanov A V, Golubev S V, Zorin V G, Razin S V, Vizir A V, Nikolaev A G, Oks E M and Yushkov G Y 2004 Multiple ionization of metal ions by ECR heating of electrons in vacuum arc plasmas Rev. Sci. Instrum. 75 188890
133. Vodopyanov A, Golubev S, Mansfeld D, Nikolaev A, Oks E, Razin S, Savkin K and Yushkov G 2005 Generation of multiply charged refractory metals in an electron-cyclotron resonant discharge in a direct magnetic trap Tech. Phys. 50 120711 (Pubitemid 41337668)
134. Vodopyanov A, Golubev S, Mansfeld D, Nikolaev A, Oks E, Khizhnyak V and Yushkov G 2007 Multiple ionization of vacuum-arc-generated metal ions in a magnetic trap heated by high-power microwave radiation Tech. Phys. Lett. 33 8724
135. Yushkov G Y, Oks E M, Anders A and Brown I G 2000 Effect of multiple current spikes on the enhancement of ion charges states of vacuum arc plasmas J. Appl. Phys. 87 834550
136. Yushkov G Y, Anders A, Oks E M and Brown I G 2000 Ion velocities in vacuum arc plasmas J. Appl. Phys. 88 561822
137. Byon E and Anders A 2003 Ion energy distribution functions of vacuum arc plasmas J. Appl. Phys. 93 1899906
138. Artamonov M F, Krasov V I and Paperny V L 2001 Generation of multiply charged ions from a cathode jet of a low-energy vacuum spark J. Phys. D: Appl. Phys. 34 33647 (Pubitemid 34050922)
139. Gorbunov S P, Krasov V P, Paperny V L and Savyelov A S 2006 Flow of multiple charged accelerated metal ions from low-inductance vacuum spark J. Phys. D: Appl. Phys. 39 50027 (Pubitemid 46217537)
140. Anders A, Brown I G, Dickinson M R and MacGill R A 1997 High energy metal ion implantation using a novel, broad beam, Marx-generator-based ion source Magis Nucl. Instrum. Methods Phys. Res. B 127/128 9925 (Pubitemid 127395117)
141. Anders A, Brown I G, MacGill R A and Dickinson M R 1997 Vacuum-spark metal ion source based on a modified Marx generator IEEE Trans. Plasma Sci. 25 71821 (Pubitemid 127828166)