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Review of Scientific Instruments

Volumn 81, Issue 2, 2010, Pages

Generation of multicomponent ion beams by a vacuum arc ion source with compound cathode

(5) Savkin, K P a Yushkov, Yu G a Nikolaev, A G a Oks, E M a Yushkov, G Yu a

a INSTITUTE OF HIGH CURRENT ELECTRONICS (Russian Federation)

Author keywords

[No Author keywords available]

Indexed keywords

CATHODE MATERIALS; CATHODE SPOT; CHARGE STATE; ION CHARGE STATE; MULTICOMPONENTS; MULTIPLY CHARGED IONS; POTENTIAL DIAGRAM; STOICHIOMETRIC COMPOSITIONS; TIME OF FLIGHT MASS SPECTROMETRY; VACUUM ARC CATHODE SPOT; VACUUM ARC ION SOURCE;

CATHODES; CAVITY RESONATORS; CHROMIUM; COBALT COMPOUNDS; ELECTRON TEMPERATURE; ION BEAMS; ION SOURCES; MASS SPECTROMETRY; METAL IONS; VACUUM;

VACUUM APPLICATIONS;

EID: 77949293069 PISSN: 00346748 EISSN: None Source Type: Journal
DOI: 10.1063/1.3257703 Document Type: Conference Paper

Times cited : (43)

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