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Volumn 25, Issue 4, 1997, Pages 718-721
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Vacuum-spark metal ion source based on a modified marx generator
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Author keywords
Ion sources; Ion charge state distribution; Marx generator; Metal ion beams; Plasma generation
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Indexed keywords
ELECTRIC POWER SUPPLIES TO APPARATUS;
ELECTRIC SPARK GAPS;
ELECTRIC SPARKS;
ION BEAMS;
ION SOURCES;
VACUUM APPLICATIONS;
ION CHARGE STATE DISTRIBUTION;
MARX GENERATOR BASED ION SOURCE (MAGIS);
PLASMA SOURCES;
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EID: 0031208053
PISSN: 00933813
EISSN: None
Source Type: Journal
DOI: 10.1109/27.640693 Document Type: Article |
Times cited : (14)
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References (11)
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