Characterization of plasma-gas interactions in a copper cathodic arc operated in oxygen

Journal of Applied Physics

Volumn 89, Issue 3, 2001, Pages 1567-1572

  Kelly, H ^a   Lepone, A ^a   Marquez A ^a  

^a Instituto de Fisica del Plasma Buenos Aires   (Argentina)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000412876     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1331071     Document Type: Article

References (16)

1. H. Randhawa, Thin Solid Films 167, 175 (1988).
2. I. I. Demidenko, N. S. Lomino, V. D. Ovcharenko, V. G. Padalka, and G. N. Poliakova, Sov. Phys. Tech. Phys. 22, 28 (1981).
3. P. J. Martin, D. R. MacKenzie, R. P. Netterfield, P. Swift, S. W. Filipczuk, K. H. Muller, C. G. Pacey, and B. James, Thin Solid Films 153, 91 (1987).
4. C. Bergman, Surf. Coat. Technol. 36, 243 (1988).
5. M. Sakaki and T. Sakakibara, IEEE Trans. Plasma Sci. 22, 1049 (1994).
6. M. M. M. Bilek, P. J. Martin, and D. R. MacKenzie, J. Appl. Phys. 83, 2965 (1998).
7. S. M. Shkolnik, IEEE Trans. Plasma Sci. 13, 336 (1985).
8. M. M. Bilek, M. Chhowalla, M. Weiler, and W. I. Milne, J. Appl. Phys. 79, 1287 (1996).
9. H. Fuchs, H. Mecke, and M. Ellrodt, Surf. Coat. Technol. 98, 839 (1998).
10. D. Grondona, H. Kelly, A. Márquez, and F. Minotti, J. Phys. D 31, 3358 (1998).
11. S. H. Lam, Phys. Fluids 8, 73 (1965).
12. Y. P. Raizer, Gas Discharge Physics (Springer, Berlin, 1991).
13. H. Kelly, A. Márquez, F. Minotti, and C. Ferro Fontán, J. Phys. D 31, 1737 (1998).
14. V. E. Golant, A. P. Zilinskij, and S. E. Sacharov, Fundamentals Plasma Physics (in Italian) (MIR, Moscow, 1983).
15. J. Kutzner and H. C. Miller, IEEE Trans. Plasma Sci. 17, 688 (1989).
16. C. W. Kimblin, J. Appl. Phys. 44, 3074 (1973).