High energy metal ion implantation using a novel, broad-beam, Marx-generator-based ion source "Magis"

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 127-128, Issue , 1997, Pages 992-995

  Anders, André ^a   Brown, Ian G ^a   Dickinson, Michael R ^a   MacGill, Robert A ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COPPER; ION BEAMS; ION IMPLANTATION; PLASMAS;

ION CHARGE STATES; MARX GENERATOR; TIME OF FLIGHT (TOF) TECHNIQUE;

ION SOURCES;

EID: 0031547794     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(97)00045-1     Document Type: Article

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