Imaging the separation of cathodic arc plasma and macroparticles in curved magnetic filters

IEEE Transactions on Plasma Science

Volumn 30, Issue 1 I, 2002, Pages 108-109

  Anders, André ^a,b  

^a IEEE   (United States)

^b UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

Cathodic vacuum arc; Imaging; Macroparticles; Plasma filter

Indexed keywords

CATHODIC ARC PLASMAS; MACROPARTICLES;

CATHODES; COATINGS; ELECTRONS; FILM PREPARATION; IMAGING TECHNIQUES; LIGHT EMISSION; MAGNETIC FILTERS; OPTIMIZATION; VACUUM;

PLASMA THEORY;

EID: 0036478148     PISSN: 00933813     EISSN: None     Source Type: Journal    
DOI: 10.1109/TPS.2002.1003947     Document Type: Article

References (12)

1. Plasma fluctuations, local partial Saha equilibrium, and the broadening of vacuum-arc ion charge state distributions
2. Apparatus to rid the plasma of a vacuum arc of macroparticles
3. Coatings technology based on the vacuum arc - A review
4. Recent progress in filtered vacuum arc deposition
5. Macroparticle contamination in cathodic arc coatings: Generation, transport, and control
6. Approaches to rid cathodic arc plasma of macro- and nanoparticles: A review
7. Twist filter for the removal of macroparticles from cathodic arc plasmas
8. Diamond-like carbon coatings by arc-discharge methods
9. Transport of vacuum arc plasma through an off-plane double bend filtering duct
10. Velocity distribution of carbon macroparticles generated by pulsed vacuum arcs
11. Ultrathin diamond-like carbon films deposited by filtered carbon vacuum arcs