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Volumn 100, Issue 21, 2012, Pages

Intrinsic origin of negative fixed charge in wet oxidation for silicon carbide

Author keywords

[No Author keywords available]

Indexed keywords

C ATOMS; FIRST-PRINCIPLES CALCULATION; NEGATIVE FIXED CHARGE; THERMAL OXIDATION; WET OXIDATION;

CALCULATIONS; OXIDATION;

SILICON CARBIDE;

EID: 84861819129 PISSN: 00036951 EISSN: None Source Type: Journal
DOI: 10.1063/1.4722782 Document Type: Article

Times cited : (21)

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