Influence of RF power on structure and electrical properties of sputtered SrHfON thin films

Materials Letters

Volumn 78, Issue , 2012, Pages 66-68

  Feng, Li Ping ^a   Liu, Zheng Tang ^a   Tian, Hao ^a   Liu, Lu ^a  

^a NORTHWESTERN POLYTECHNICAL UNIVERSITY   (China)

Author keywords

Electrical properties; Magnetron sputtering; RF power; SrHfON

Indexed keywords

FLAT-BAND VOLTAGE SHIFT; RADIO-FREQUENCY (RF) MAGNETRON; RF-POWER; SRHFON;

AMORPHOUS FILMS; MAGNETRON SPUTTERING; THIN FILMS;

ELECTRIC PROPERTIES;

EID: 84861604272     PISSN: 0167577X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.matlet.2012.03.024     Document Type: Article

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