메뉴 건너뛰기




Volumn 59, Issue 6, 2012, Pages 1701-1708

Top-gate staggered a-IGZO TFTs adopting the bilayer gate insulator for driving AMOLED

Author keywords

Active matrix organic light emitting display (AMOLED); bilayer gate insulator; In Ga Zn O (IGZO); thin film transistors (TFTs)

Indexed keywords

ACTIVE MATRIXES; AM-OLED; BACK CHANNELS; BI-LAYER; CHANNEL LAYERS; DEVICE PERFORMANCE; ENVIRONMENTAL STABILITY; ETCHING PROCESS; GATE INSULATOR; IN-GA-ZN-O; INTERFACE PROPERTY; ORGANIC LIGHT-EMITTING; THIN-FILM TRANSISTOR (TFTS);

EID: 84861341691     PISSN: 00189383     EISSN: None     Source Type: Journal    
DOI: 10.1109/TED.2012.2191409     Document Type: Article
Times cited : (28)

References (36)
  • 1
    • 4444316093 scopus 로고    scopus 로고
    • Amorphous silicon thin film transistor circuit integration for organic LED displays on glass and plastic
    • Sep.
    • A. Nathan, A. Kumar, K. Sakariya, P. Servati, S. Sambandan, and D. Striakhilev, "Amorphous silicon thin film transistor circuit integration for organic LED displays on glass and plastic," IEEE J. Solid-State Circuits, vol. 39, no. 9, pp. 1477-1486, Sep. 2004.
    • (2004) IEEE J. Solid-State Circuits , vol.39 , Issue.9 , pp. 1477-1486
    • Nathan, A.1    Kumar, A.2    Sakariya, K.3    Servati, P.4    Sambandan, S.5    Striakhilev, D.6
  • 2
    • 0036611269 scopus 로고    scopus 로고
    • Active-matrix organic light-emitting diode displays realized using metal-induced unilaterally crystallized polycrystalline silicon thin-film transistors
    • Jun.
    • Z. Meng and M. Wong, "Active-matrix organic light-emitting diode displays realized using metal-induced unilaterally crystallized polycrystalline silicon thin-film transistors," IEEE Trans. Electron Devices, vol. 49, no. 6, pp. 991-996, Jun. 2002.
    • (2002) IEEE Trans. Electron Devices , vol.49 , Issue.6 , pp. 991-996
    • Meng, Z.1    Wong, M.2
  • 4
    • 10644240902 scopus 로고    scopus 로고
    • Stability analysis of current programmed a-Si:H AMOLED pixel circuits
    • Dec.
    • K. Sakariya, P. Servati, and A. Nathan, "Stability analysis of current programmed a-Si:H AMOLED pixel circuits," IEEE Trans. Electron Devices, vol. 51, no. 12, pp. 2019-2025, Dec. 2004.
    • (2004) IEEE Trans. Electron Devices , vol.51 , Issue.12 , pp. 2019-2025
    • Sakariya, K.1    Servati, P.2    Nathan, A.3
  • 5
    • 29344441251 scopus 로고    scopus 로고
    • Driving schemes for a-Si and LTPS AMOLED displays
    • Dec.
    • A. Nathan, G. R. Chaji, and S. J. Ashtiani, "Driving schemes for a-Si and LTPS AMOLED displays," J. Display Technol., vol. 1, no. 2, pp. 267-277, Dec. 2005.
    • (2005) J. Display Technol. , vol.1 , Issue.2 , pp. 267-277
    • Nathan, A.1    Chaji, G.R.2    Ashtiani, S.J.3
  • 6
    • 9744248669 scopus 로고    scopus 로고
    • Room-temperature fabrication of transparent flexible thin-film transistors using amorphous oxide semiconductors
    • Nov.
    • K. Nomura, H. Ohta, A. Takagi, T. Kamiya, M. Hirano, and H. Hosono, "Room-temperature fabrication of transparent flexible thin-film transistors using amorphous oxide semiconductors," Nature, vol. 432, no. 7016, pp. 488-492, Nov. 2004.
    • (2004) Nature , vol.432 , Issue.7016 , pp. 488-492
    • Nomura, K.1    Ohta, H.2    Takagi, A.3    Kamiya, T.4    Hirano, M.5    Hosono, H.6
  • 7
    • 41649120938 scopus 로고    scopus 로고
    • Modeling of amorphous InGaZnO4 thin film transistors and their subgap density of states
    • Mar.
    • H. H. Hsieh, T. Kamiya, K. Nomura, H. Hosono, and C. C.Wu, "Modeling of amorphous InGaZnO4 thin film transistors and their subgap density of states," Appl. Phys. Lett., vol. 92, no. 13, pp. 133503-1-133503-3, Mar. 2008.
    • (2008) Appl. Phys. Lett. , vol.92 , Issue.13 , pp. 1335031-1335033
    • Hsieh, H.H.1    Kamiya, T.2    Nomura, K.3    Hosono, H.4    Wu, C.C.5
  • 8
    • 33746606543 scopus 로고    scopus 로고
    • Scaling behavior of ZnO transparent thinfilm transistors
    • Jul.
    • H. H. Hsieh and C. C. Wu, "Scaling behavior of ZnO transparent thinfilm transistors," Appl. Phys. Lett., vol. 89, no. 4, pp. 041109-1-041109-3, Jul. 2006.
    • (2006) Appl. Phys. Lett. , vol.89 , Issue.4 , pp. 0411091-0411093
    • Hsieh, H.H.1    Wu, C.C.2
  • 9
    • 33745435681 scopus 로고    scopus 로고
    • Ionic amorphous oxide semiconductors: Material design, carrier transport, and device application
    • Jun.
    • H. Hosono, "Ionic amorphous oxide semiconductors: Material design, carrier transport, and device application," J. Non-Cryst. Solids, vol. 352, no. 9-20, pp. 851-858, Jun. 2006.
    • (2006) J. Non-Cryst. Solids , vol.352 , Issue.9-20 , pp. 851-858
    • Hosono, H.1
  • 11
    • 34249697083 scopus 로고    scopus 로고
    • High mobility bottom gate InGaZnO thin film transistors with SiOx etch stopper
    • May
    • M. Kim, J. H. Jeong, H. J. Lee, T. K. Ahn, H. S. Shin, J. S. Park, J. K. Jeong, Y. G. Mo, and H. D. Kim, "High mobility bottom gate InGaZnO thin film transistors with SiOx etch stopper," Appl. Phys. Lett., vol. 90, no. 21, pp. 212114-1-212114-3, May 2007.
    • (2007) Appl. Phys. Lett. , vol.90 , Issue.21 , pp. 2121141-2121143
    • Kim, M.1    Jeong, J.H.2    Lee, H.J.3    Ahn, T.K.4    Shin, H.S.5    Park, J.S.6    Jeong, J.K.7    Mo, Y.G.8    Kim, H.D.9
  • 12
    • 77952579039 scopus 로고    scopus 로고
    • 4.0-inch active-matrix organic light-emitting diode display integrated with driver circuits using amorphous In-Ga-Zn-Oxide thin-film transistors with suppressed variation
    • Mar.
    • H. Ohara, T. Sasaki, K. Noda, S. Ito, M. Sasaki, Y. Endo, S. Yoshitomi, J. Sakata, T. Serikawa, and S. Yamazaki, "4.0-inch active-matrix organic light-emitting diode display integrated with driver circuits using amorphous In-Ga-Zn-Oxide thin-film transistors with suppressed variation," Jpn. J. Appl. Phys., vol. 49, no. 3, pp. 03CD02-1-03CD02-6, Mar. 2010.
    • (2010) Jpn. J. Appl. Phys. , vol.49 , Issue.3
    • Ohara, H.1    Sasaki, T.2    Noda, K.3    Ito, S.4    Sasaki, M.5    Endo, Y.6    Yoshitomi, S.7    Sakata, J.8    Serikawa, T.9    Yamazaki, S.10
  • 13
    • 39749191514 scopus 로고    scopus 로고
    • Electronic transport properties of amorphous indium-gallium-zinc oxide semiconductor upon exposure to water
    • Feb.
    • J. S. Park, J. K. Jeong, H. J. Chung, Y. G. Mo, and H. D. Kim, "Electronic transport properties of amorphous indium-gallium-zinc oxide semiconductor upon exposure to water," Appl. Phys. Lett., vol. 92, no. 7, pp. 072104-1-072104-3, Feb. 2008.
    • (2008) Appl. Phys. Lett. , vol.92 , Issue.7 , pp. 0721041-0721043
    • Park, J.S.1    Jeong, J.K.2    Chung, H.J.3    Mo, Y.G.4    Kim, H.D.5
  • 14
    • 77953765579 scopus 로고    scopus 로고
    • Influence of positive bias stress on N2O plasma improved InGaZnO thin-film transistor
    • Jun.
    • C. T. Tsai, T. C. Chang, S. C. Chen, I. Lo, S. W. Tsao, M. C. Hung, J. J. Chang, C. Y. Wu, and C. Y. Huang, "Influence of positive bias stress on N2O plasma improved InGaZnO thin-film transistor," Appl. Phys. Lett., vol. 96, no. 24, pp. 242105-1-242105-3, Jun. 2010.
    • (2010) Appl. Phys. Lett. , vol.96 , Issue.24 , pp. 2421051-2421053
    • Tsai, C.T.1    Chang, T.C.2    Chen, S.C.3    Lo, I.4    Tsao, S.W.5    Hung, M.C.6    Chang, J.J.7    Wu, C.Y.8    Huang, C.Y.9
  • 16
    • 70450211244 scopus 로고    scopus 로고
    • Self-aligned top-gate coplanar In-Ga-Zn-O thin-film transistors
    • Dec.
    • C. H.Wu, H. H. Hsieh, C.W. Chien, and C. C.Wu, "Self-aligned top-gate coplanar In-Ga-Zn-O thin-film transistors," J. Display Technol., vol. 5, no. 12, pp. 515-519, Dec. 2009.
    • (2009) J. Display Technol. , vol.5 , Issue.12 , pp. 515-519
    • Wu, C.H.1    Hsieh, H.H.2    Chien, C.W.3    Wu, C.C.4
  • 19
    • 67349285093 scopus 로고    scopus 로고
    • Source/drain formation of self-aligned top-gate amorphous GaInZnO thin-film transistors by NH3 plasma treatment
    • Apr.
    • S. Kim, J. Park, C. Kim, I. Song, S. Kim, S. Park, H. Yin, H. I. Lee, E. Lee, and Y. Park, "Source/drain formation of self-aligned top-gate amorphous GaInZnO thin-film transistors by NH3 plasma treatment," IEEE Electron Device Lett., vol. 30, no. 4, pp. 374-376, Apr. 2009.
    • (2009) IEEE Electron Device Lett. , vol.30 , Issue.4 , pp. 374-376
    • Kim, S.1    Park, J.2    Kim, C.3    Song, I.4    Kim, S.5    Park, S.6    Yin, H.7    Lee, H.I.8    Lee, E.9    Park, Y.10
  • 20
    • 36048944461 scopus 로고    scopus 로고
    • Amorphous ZnO transparent thin-film transistors fabricated by fully lithographic and etching processes
    • Jul.
    • H. H. Hsieh and C. C.Wu, "Amorphous ZnO transparent thin-film transistors fabricated by fully lithographic and etching processes," Appl. Phys. Lett., vol. 91, no. 1, pp. 013502-1-013502-3, Jul. 2007.
    • (2007) Appl. Phys. Lett. , vol.91 , Issue.1 , pp. 0135021-0135023
    • Hsieh, H.H.1    Wu, C.C.2
  • 21
    • 77958195570 scopus 로고    scopus 로고
    • Influence of channel-deposition conditions and gate insulators on performance and stability of top-gate IGZO transparent thinfilm transistors
    • Oct.
    • H. H. Hsieh, C. H. Wu, C. W. Chien, C. K. Chen, C. S. Yang, and C. C. Wu, "Influence of channel-deposition conditions and gate insulators on performance and stability of top-gate IGZO transparent thinfilm transistors," J. Soc. Inf. Display, vol. 18, no. 10, pp. 796-801, Oct. 2010.
    • (2010) J. Soc. Inf. Display , vol.18 , Issue.10 , pp. 796-801
    • Hsieh, H.H.1    Wu, C.H.2    Chien, C.W.3    Chen, C.K.4    Yang, C.S.5    Wu, C.C.6
  • 22
    • 77649317049 scopus 로고    scopus 로고
    • Comprehensive studies on the stabilities of a-In-Ga-Zn-O based thin film transistor by constant current stress
    • Mar.
    • K. Nomura, T. Kamiya, Y. Kikuchi, M. Hirano, and H. Hosono, "Comprehensive studies on the stabilities of a-In-Ga-Zn-O based thin film transistor by constant current stress," Thin Solid Films, vol. 518, no. 11, pp. 3012-3016, Mar. 2010.
    • (2010) Thin Solid Films , vol.518 , Issue.11 , pp. 3012-3016
    • Nomura, K.1    Kamiya, T.2    Kikuchi, Y.3    Hirano, M.4    Hosono, H.5
  • 23
    • 0006493912 scopus 로고
    • Novel humidity-detection mechanism for ZnO dense pellets
    • Feb.
    • E. Traversa and A. Bearzotti, "Novel humidity-detection mechanism for ZnO dense pellets," Sens. Actuators B, Chem., vol. 23, no. 2/3, pp. 181-186, Feb. 1995.
    • (1995) Sens. Actuators B, Chem. , vol.23 , Issue.2-3 , pp. 181-186
    • Traversa, E.1    Bearzotti, A.2
  • 24
    • 71949116567 scopus 로고    scopus 로고
    • Environment-dependent metastability of passivation-free indium zinc oxide thin film transistor after gate bias stress
    • Dec.
    • P. T. Liu, Y. T. Chou, and L. F. Teng, "Environment-dependent metastability of passivation-free indium zinc oxide thin film transistor after gate bias stress," Appl. Phys. Lett., vol. 95, no. 23, pp. 233504-1-233504-3, Dec. 2009.
    • (2009) Appl. Phys. Lett. , vol.95 , Issue.23 , pp. 2335041-2335043
    • Liu, P.T.1    Chou, Y.T.2    Teng, L.F.3
  • 26
    • 0024717539 scopus 로고
    • Effective and field-effect mobilities in Si MOSFETs
    • Aug.
    • J. S. Kang, D. K. Schroder, and A. R. Alvarez, "Effective and field-effect mobilities in Si MOSFETs," Solid State Electron., vol. 32, no. 8, pp. 679-681, Aug. 1989.
    • (1989) Solid State Electron. , vol.32 , Issue.8 , pp. 679-681
    • Kang, J.S.1    Schroder, D.K.2    Alvarez, A.R.3
  • 27
    • 0020087476 scopus 로고
    • A simple and accurate method to measure the threshold voltage of an enhancement-mode MOSFET
    • Feb.
    • H. G. Lee, S. Y. Oh, and G. Fuller, "A simple and accurate method to measure the threshold voltage of an enhancement-mode MOSFET," IEEE Trans. Electron Devices, vol. ED-29, no. 2, pp. 346-348, Feb. 1982.
    • (1982) IEEE Trans. Electron Devices , vol.ED-29 , Issue.2 , pp. 346-348
    • Lee, H.G.1    Oh, S.Y.2    Fuller, G.3
  • 28
    • 43649105635 scopus 로고    scopus 로고
    • A novel voltage-feedback pixel circuit for AMOLED displays
    • Mar.
    • C. L. Lin, T. T. Tsai, and Y. C. Chen, "A novel voltage-feedback pixel circuit for AMOLED displays," J. Display Technol., vol. 4, no. 1, pp. 54-60, Mar. 2008.
    • (2008) J. Display Technol. , vol.4 , Issue.1 , pp. 54-60
    • Lin, C.L.1    Tsai, T.T.2    Chen, Y.C.3
  • 29
    • 77954150173 scopus 로고    scopus 로고
    • Long lifetime and high efficiency electron transporting materials for green phosphorescent emitters
    • H. L. Huang, T. C. Chao, J. S. Lin, and M. R. Tseng, "Long lifetime and high efficiency electron transporting materials for green phosphorescent emitters," in Proc. 16th Int. Display Workshops, 2009, p. 1049.
    • (2009) Proc. 16th Int. Display Workshops , pp. 1049
    • Huang, H.L.1    Chao, T.C.2    Lin, J.S.3    Tseng, M.R.4
  • 30
    • 0012702873 scopus 로고
    • A comparative study on structural and electronic properties of PECVD a-SiOx with a-SiNx
    • Jul.
    • K. Maeda, N. Sakamoto, and I. Umezu, "A comparative study on structural and electronic properties of PECVD a-SiOx with a-SiNx," J. Non-Cryst. Solids, vol. 187, pp. 287-290, Jul. 1995.
    • (1995) J. Non-Cryst. Solids , vol.187 , pp. 287-290
    • Maeda, K.1    Sakamoto, N.2    Umezu, I.3
  • 31
    • 0141745997 scopus 로고    scopus 로고
    • Quantitative comparisons of dissolved hydrogen density and the electrical and optical properties of ZnO
    • Sep.
    • C. H. Seager and S. M. Myers, "Quantitative comparisons of dissolved hydrogen density and the electrical and optical properties of ZnO," J. Appl. Phys., vol. 94, no. 5, pp. 2888-2894, Sep. 2003.
    • (2003) J. Appl. Phys. , vol.94 , Issue.5 , pp. 2888-2894
    • Seager, C.H.1    Myers, S.M.2
  • 32
    • 79953780445 scopus 로고    scopus 로고
    • Effects of channel dimensions on performance of a-InGaZnO4 thin-film transistors
    • Mar.
    • Y. W. Heo, K. M. Cho, S. Y. Sun, S. Y. Kim, J. H. Lee, and J. J. Kim, "Effects of channel dimensions on performance of a-InGaZnO4 thin-film transistors," J. Vac. Sci. Technol. B, vol. 29, no. 2, pp. 021203-1-021203-7, Mar. 2011.
    • (2011) J. Vac. Sci. Technol. B , vol.29 , Issue.2 , pp. 0212031-0212037
    • Heo, Y.W.1    Cho, K.M.2    Sun, S.Y.3    Kim, S.Y.4    Lee, J.H.5    Kim, J.J.6
  • 33
    • 0042948502 scopus 로고    scopus 로고
    • Hysteresis caused by water molecules in carbon nanotube field-effect transistors
    • Feb.
    • W. Kim, A. Javey, O. Vermesh, Q. Wang, Y. Li, and H. Dai, "Hysteresis caused by water molecules in carbon nanotube field-effect transistors," Nano Lett., vol. 3, no. 2, pp. 193-198, Feb. 2003.
    • (2003) Nano Lett. , vol.3 , Issue.2 , pp. 193-198
    • Kim, W.1    Javey, A.2    Vermesh, O.3    Wang, Q.4    Li, Y.5    Dai, H.6
  • 34
    • 33748414201 scopus 로고    scopus 로고
    • High-performance transparent barrier films of SiOx/SiNx Stacks on Flexible Polymer Substrates
    • Aug.
    • T. N. Chen, D. S. Wu, C. C. Wu, C. C. Chiang, Y. P. Chen, and R. H. Horng, "High-performance transparent barrier films of SiOx/SiNx Stacks on Flexible Polymer Substrates," J. Electrochem. Soc., vol. 153, no. 10, pp. F244-F248, Aug. 2006.
    • (2006) J. Electrochem. Soc. , vol.153 , Issue.10
    • Chen, T.N.1    Wu, D.S.2    Wu, C.C.3    Chiang, C.C.4    Chen, Y.P.5    Horng, R.H.6
  • 35
    • 55949108135 scopus 로고    scopus 로고
    • Effect of oxygen on the optical and the electrical properties of amorphous InGaZnO thin films prepared by RF magnetron sputtering
    • J. H. Shin and D. K. Choi, "Effect of oxygen on the optical and the electrical properties of amorphous InGaZnO thin films prepared by RF magnetron sputtering," J. Korean Phys. Soc., vol. 53, no. 4, pp. 2019-2023, 2008.
    • (2008) J. Korean Phys. Soc. , vol.53 , Issue.4 , pp. 2019-2023
    • Shin, J.H.1    Choi, D.K.2
  • 36
    • 79551599976 scopus 로고    scopus 로고
    • Quantitative calculation of oxygen incorporation in sputtered IGZO films and the impact on transistor properties
    • Jan.
    • S. Kwon, J. H. Noh, J. Noh, and P. D. Rackz, "Quantitative calculation of oxygen incorporation in sputtered IGZO films and the impact on transistor properties," J. Electrochem. Soc., vol. 158, no. 3, pp. H289-H293, Jan. 2011.
    • (2011) J. Electrochem. Soc. , vol.158 , Issue.3
    • Kwon, S.1    Noh, J.H.2    Noh, J.3    Rackz, P.D.4


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.