Fabrication and characteristics of ZnO thin films deposited by RF sputtering on plastic substrates for flexible display

Science China Information Sciences

Volumn 55, Issue 6, 2012, Pages 1441-1445

  Han, De Dong ^a   Wang, Yi ^a   Zhang, Sheng Dong ^a   Sun, Lei ^a   Han, Ru Qi ^a   Matsumoto, Satoru ^b   Ino, Yuji ^b  

^a PEKING UNIVERSITY   (China)

^b KEIO UNIVERSITY   (Japan)

Author keywords

flexible display; plastic substrate; room temperature process; sputtering; ZnO thin film

Indexed keywords

EID: 84861186634     PISSN: 1674733X     EISSN: None     Source Type: Journal    
DOI: 10.1007/s11432-011-4348-y     Document Type: Article

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