Advances in manufacturing of molded tips for scanning probe microscopy

Journal of Microelectromechanical Systems

Volumn 21, Issue 2, 2012, Pages 431-442

  Moldovan, Nicolaie ^a   Dai, Zhenting ^a   Zeng, Hongjun ^a   Carlisle, John A ^a   Jacobs, Tevis D B ^b   Vahdat, Vahid ^b   Grierson, David S ^c,d   Liu, Jingjing ^c,e   Turner, Kevin T ^b,c   Carpick, Robert W ^b  

^a ADVANCED DIAMOND TECHNOLOGIES INC   (United States)

^b UNIVERSITY OF PENNSYLVANIA   (United States)

^c UNIVERSITY OF WISCONSIN MADISON   (United States)

^d SysteMECH   (United States)

^e APPLIED MATERIALS INC   (United States)

Author keywords

Atomic force microscopy (AFM); crystallographic etching; molding; scanning probe microscopy (SPM); silicon; tips

Indexed keywords

MANUFACTURING PROCESS; NANOSCALE TIP; ONE DIMENSION; OTHER APPLICATIONS; SHARP TIP; SILICON SUBSTRATES; SINGLE POINT; THIN FILM MATERIAL; TIP APEX; TIPS; ULTRA-NANOCRYSTALLINE DIAMOND;

ATOMIC FORCE MICROSCOPY; DIAMOND DEPOSITS; FILMS; MOLDING; MOLDS; SILICON; SILICON NITRIDE;

SILICON WAFERS;

EID: 84859723322     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2011.2174430     Document Type: Article

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