Fabrication of all-metal field emitter arrays with controlled apex sizes by molding

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 27, Issue 4, 2009, Pages 1813-1820

  Kirk, E ^a   Tsujino, S ^a   Vogel, T ^a   Jefimovs, K ^b   Gobrecht, J ^a   Wrulich, A ^a  

^a PAUL SCHERRER INSTITUTE   (Switzerland)

^b SWISS FEDERAL LABORATORIES FOR MATERIALS SCIENCE AND TECHNOLOGY   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

EMISSION CURRENT; FABRICATION PROCESS; FIELD EMITTER ARRAYS; FIELD-EMISSION CHARACTERISTICS; GATE ELECTRODES; GATED EMITTER; HIGH-RESOLUTION SCANNING ELECTRON MICROSCOPES; LITHOGRAPHIC METHODS; MOLDING TECHNIQUES; MOLYBDENUM FIELD EMITTER ARRAYS; NANO-METER SCALE; SELF ALIGNED PROCESS; SINGLE-GATE DEVICES;

METAL MOLDING; MOLYBDENUM; SCANNING; SCANNING ELECTRON MICROSCOPY;

FABRICATION;

EID: 68349133813     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.3151852     Document Type: Article

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