Ion assisted growth of B 4C diffusion barrier layers in Mo/Si multilayered structures

Journal of Applied Physics

Volumn 111, Issue 6, 2012, Pages

  Bruijn, S ^a   Van De Kruijs, R W E ^a   Yakshin, A E ^a   Bijkerk, F ^a,b  

^a FOM INSTITUTE FOR PLASMA PHYSICS RIJNHUIZEN   (Netherlands)

^b UNIVERSITY OF TWENTE   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

BARRIER LAYERS; DIFFUSION BARRIER LAYERS; GRAZING INCIDENCE; IN-SITU; ION ASSISTANCE; ION-ASSISTED GROWTH; LAYERED SYSTEMS; MULTI-LAYERED STRUCTURE; X RAY REFLECTION;

THERMODYNAMIC STABILITY;

DIFFUSION BARRIERS;

EID: 84859525679     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3693992     Document Type: Article

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