SCOPUS 정보 검색 플랫폼

Volumn 6517, Issue PART 1, 2007, Pages

Enhanced reflectance of interface engineered Mo/Si multilayers produced by thermal particle deposition

Author keywords

B4C; Barrier; Deposition; Diffusion; EUV; Interface; Mo; Multilayer; Reflectance; Si; Stress

Indexed keywords

DEPOSITION; DIFFUSION; ELECTRON BEAMS; MAGNETRON SPUTTERING; MOLYBDENUM; REFLECTION; SILICON; STRESS ANALYSIS; THERMODYNAMIC PROPERTIES;

THERMAL PARTICLE DEPOSITION; ULTRA THIN REFLECTANCE ENHANCEMENT;

MULTILAYERS;

EID: 35148835211 PISSN: 0277786X EISSN: None Source Type: Conference Proceeding
DOI: 10.1117/12.711796 Document Type: Conference Paper

Times cited : (46)

References (11)

1
- 0028322842
- E. Louis, H. J. Voorma, N.B. Koster, L. Shmaenok, F. Bijkerk, R. Schlatmann, Microelectronic Engineering 23 (1994) 215-218
- (1994) Microelectronic Engineering , vol.23 , pp. 215-218
- Louis, E.¹ Voorma, H.J.² Koster, N.B.³ Shmaenok, L.⁴ Bijkerk, F.⁵ Schlatmann, R.⁶

2
- 0004055759
- SPIE Optical Engineering Press, Bellingham, Washington, USA
- E. Spiller, Soft X-ray optics, SPIE Optical Engineering Press, Bellingham, Washington, USA, (1994) 170
- (1994) Soft X-ray optics , pp. 170
- Spiller, E.¹

3
- 0028444986
- R. Schlatmann, S. Lu, J. Verhoeven, E.J. Puik, M.J. van der Wiel, Appl.Surf. Sci 78, 1994, 147
- (1994) Appl.Surf. Sci , vol.78 , pp. 147
- Schlatmann, R.¹ Lu, S.² Verhoeven, J.³ Puik, E.J.⁴ van der Wiel, M.J.⁵

4
- 0141501387
- J. Tümmler, H. Blume, G. Brandt, J. Eden, B. Meyer, H. Scherr, F. Scholz, G. Ulm, Proc. SPIE 5037(2003) 265
- (2003) Proc. SPIE , vol.5037 , pp. 265
- Tümmler, J.¹ Blume, H.² Brandt, G.³ Eden, J.⁴ Meyer, B.⁵ Scherr, H.⁶ Scholz, F.⁷ Ulm, G.⁸

5
- 15844400105
- A. Gottwald, U. Kroth, M. Letz, H. Schoeppe, M. Richter, Proc. SPIE 5538, (2004) 157-164
- (2004) Proc. SPIE , vol.5538 , pp. 157-164
- Gottwald, A.¹ Kroth, U.² Letz, M.³ Schoeppe, H.⁴ Richter, M.⁵

6
- 0037989858
- Stefan Braun, Hermann Mai, Matthew Moss, and Roland Scholz, Proc. SPIE 4782, (2002) 185
- (2002) Proc. SPIE , vol.4782 , pp. 185
- Braun, S.¹ Mai, H.² Moss, M.³ Scholz, R.⁴

7
- 0035766813
- Sasa Bajt, Jennifer B. Alameda, Troy W. Barbee, Jr., W. Miles Gift, James A. Folta, Benjamin B. Kaufmann, Eberhard A. Spiller, Proc. SPIE 4506, p. 65-75 (2001)
- Sasa Bajt, Jennifer B. Alameda, Troy W. Barbee, Jr., W. Miles Gift, James A. Folta, Benjamin B. Kaufmann, Eberhard A. Spiller, Proc. SPIE Vol. 4506, p. 65-75 (2001)

8
- 0033741871
- D.K.G. de Boer, Editor, Elsevier, Amsterdam
- A.E. Yakshin, E. Louis, P.C. Gorts, E.L.G. Maas and F. Bijkerk. In: D.K.G. de Boer, Editor, Physica B Vol. 283, Elsevier, Amsterdam (2000), 143.
- (2000) Physica B , vol.283 , pp. 143
- Yakshin, A.E.¹ Louis, E.² Gorts, P.C.³ Maas, E.L.G.⁴ Bijkerk, F.⁵

9
- 0035878768
- S. Bajt, D. G. Stearns, P. A. Kearney, J.Appl. Phys. 90, 1017-1025 (2001).
- (2001) J.Appl. Phys , vol.90 , pp. 1017-1025
- Bajt, S.¹ Stearns, D.G.² Kearney, P.A.³

10
- 35148864826
- M. Shiraishi, et al SPIE (2004) 5374-11
- (2004) SPIE , pp. 5374-5311
- Shiraishi, M.¹

11
- 0141612915
- Emerging Lithographic Technologies VII
- E. Zoethout, G.Sipos, R.W.E. van de Kruijs, A.E. Yakshin, E. Louis, S. Muellender, and F. Bijkerk, Emerging Lithographic Technologies VII, SPIE Vol. 5037, (2003) 872-877
- (2003) SPIE , vol.5037 , pp. 872-877
- Zoethout, E.¹ Sipos, G.² van de Kruijs, R.W.E.³ Yakshin, A.E.⁴ Louis, E.⁵ Muellender, S.⁶ Bijkerk, F.⁷

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.