Time and space resolved visible spectroscopic imaging CO 2 laser produced extreme ultraviolet emitting tin plasmas

Journal of Applied Physics

Volumn 111, Issue 6, 2012, Pages

  Wu, Tao ^a,b   Wang, Xinbing ^a   Wang, Shaoyi ^a   Tang, Jian ^a   Lu, Peixiang ^a   Lu, Hong ^a  

^a HUAZHONG UNIVERSITY OF SCIENCE AND TECHNOLOGY   (China)

^b WUHAN INSTITUTE OF TECHNOLOGY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

13.5 NM; AXIAL DISTANCE; DELAY TIME; DOUBLE PULSE; EXTREME ULTRAVIOLET; EXTREME ULTRAVIOLET EMISSION; IMAGE SPECTRA; IN-VACUUM; IONIZED SPECIES; LASER-PRODUCED TIN PLASMAS; PLASMA PARAMETER; PLASMA PLUMES; PLASMA TEMPERATURE; PULSE DISCHARGE; RADIAL DIRECTION; RADIAL DISTANCE; SPECTRAL MEASUREMENT; SPECTROSCOPIC IMAGING; SPECTRUM PROFILE; TARGET SURFACE; TIME EVOLUTIONS; TIN PLASMA; UNRESOLVED TRANSITION ARRAY;

CARBON DIOXIDE; CARRIER CONCENTRATION; COLLISIONAL PLASMAS; ELECTRIC DISCHARGES; ELECTRON DENSITY MEASUREMENT; ELECTRON TEMPERATURE; ELECTRONS; EXTREME ULTRAVIOLET LITHOGRAPHY; FULL WIDTH AT HALF MAXIMUM; PLASMA DEVICES; SPATIAL DISTRIBUTION; TIN;

ULTRAVIOLET LASERS;

EID: 84859519838     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3698628     Document Type: Article

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