SCOPUS 정보 검색 플랫폼

Applied Physics Letters

Volumn 98, Issue 20, 2011, Pages

Dynamics of laser-produced Sn microplasma for a high-brightness extreme ultraviolet light source

(6) Yuspeh, S a Tao, Y a Burdt, R A a Tillack, M S a Ueno, Y a Najmabadi, F a

a UNIVERSITY OF CALIFORNIA (United States)

Author keywords

[No Author keywords available]

Indexed keywords

13.5 NM; ELECTRON PLASMAS; EUV EMISSIONS; EXTREME ULTRAVIOLET LIGHT SOURCES; EXTREME ULTRAVIOLET RADIATIONS; FOCAL SPOT; HIGH BRIGHTNESS; LASER ENERGY DEPOSITION; MICRO-PLASMAS; PLASMA EXPANSION; RADIATION TRANSPORT; SCALE LENGTH; SPOT SIZES;

CONVERSION EFFICIENCY; EXTREME ULTRAVIOLET LITHOGRAPHY; LIGHT SOURCES; PLASMA DENSITY; PLASMA DEPOSITION; TIN; ULTRAVIOLET RADIATION;

ULTRAVIOLET LASERS;

EID: 79957567242 PISSN: 00036951 EISSN: None Source Type: Journal
DOI: 10.1063/1.3589359 Document Type: Article

Times cited : (31)

References (21)

1
- 73549094237
- 1749-4885, 10.1038/nphoton.2009.251
- C. Wagner and N. Harned, Nat. Photonics 1749-4885 4, 24 (2010). 10.1038/nphoton.2009.251
- (2010) Nat. Photonics , vol.4 , pp. 24
- Wagner, C.¹ Harned, N.²

2
- 0036671788
- Improved reflectance and stability of Mo-Si multilayers
- DOI 10.1117/1.1489426
- S. Bajt, J. Alameda, T. Barbee, Jr., W. Clift, J. Folta, B. Kaufmann, and E. Spiller, Opt. Eng. 0091-3286 41, 1797 (2002). 10.1117/1.1489426 (Pubitemid 35019741)
- (2002) Optical Engineering , vol.41 , Issue.8 , pp. 1797-1804
- Bajt, S.¹ Alameda, J.B.² Barbee Jr., T.W.³ Cliff, W.M.⁴ Folta, J.A.⁵ Kaufmann, B.⁶ Spiller, E.A.⁷

3
- 79957564542
- Wailea, Maui, Hawaii
- K. Goldberg, 2008 International Workshop on EUV Lithography, Wailea, Maui, Hawaii, 2008.
- (2008) 2008 International Workshoon EUV Lithography
- Goldberg, K.¹

4
- 0000805935
- 0003-6935, 10.1364/AO.38.007252
- P. Naulleau, K. Goldberg, S. Lee, C. Chang, D. Attwood, and J. Bokor, Appl. Opt. 0003-6935 38, 7252 (1999). 10.1364/AO.38.007252
- (1999) Appl. Opt. , vol.38 , pp. 7252
- Naulleau, P.¹ Goldberg, K.² Lee, S.³ Chang, C.⁴ Attwood, D.⁵ Bokor, J.⁶

5
- 33646018624
- 0167-9317, 10.1016/j.mee.2006.01.096
- R. Klein, C. Laubis, R. Müller, F. Scholze, and G. Ulm, Microelectron. Eng. 0167-9317 83, 707 (2006). 10.1016/j.mee.2006.01.096
- (2006) Microelectron. Eng. , vol.83 , pp. 707
- Klein, R.¹ Laubis, C.² Müller, R.³ Scholze, F.⁴ Ulm, G.⁵

6
- 35148883327
- Laser-produced plasma source system development
- DOI 10.1117/12.713454, Emerging Lithographic Technologies XI
- I. Fomenkov, D. Brandt, A. Bykanov, A. Ershov, W. Partlo, D. Myers, N. Böwering, G. Vaschenko, O. Khodykin, and J. Hoffman, Proc. SPIE 0277-786X 6517, 65173J (2007). 10.1117/12.713454 (Pubitemid 47550838)
- (2007) Proceedings of SPIE - The International Society for Optical Engineering , vol.6517 , Issue.PART 2
- Fomenkov, I.V.¹ Brandt, D.C.² Bykanov, A.N.³ Ershov, A.I.⁴ Partlo, W.N.⁵ Myers, D.W.⁶ Bowering, N.R.⁷ Vaschenko, G.O.⁸ Khodykin, O.V.⁹ Hoffman, J.R.¹⁰ Vargas L, E.¹¹ Simmons, R.D.¹² Chavez, J.A.¹³ Chrobak, C.P.¹⁴

7
- 46049111206
- 0003-6951, 10.1063/1.2951595
- Y. Tao, M. S. Tillack, K. L. Sequoia, R. A. Burdt, S. Yuspeh, and F. Najmabadi, Appl. Phys. Lett. 0003-6951 92, 251501 (2008). 10.1063/1.2951595
- (2008) Appl. Phys. Lett. , vol.92 , pp. 251501
- Tao, Y.¹ Tillack, M.S.² Sequoia, K.L.³ Burdt, R.A.⁴ Yuspeh, S.⁵ Najmabadi, F.⁶

8
- 33749486534
- Effect of focal spot size on in-band 13.5 nm extreme ultraviolet emission from laser-produced Sn plasma
- DOI 10.1364/OL.31.002492
- Y. Tao, S. S. Harilal, M. S. Tillack, K. L. Sequoia, B. O'Shay, and F. Najmabadi, Opt. Lett. 0146-9592 31, 2492 (2006). 10.1364/OL.31.002492 (Pubitemid 44517671)
- (2006) Optics Letters , vol.31 , Issue.16 , pp. 2492-2494
- Tao, Y.¹ Harilal, S.S.² Tillack, M.S.³ Sequoia, K.L.⁴ O'Shay, B.⁵ Najmabadi, F.⁶

9
- 71949128381
- 0003-6951, 10.1063/1.3270526
- S. S. Harilal, R. W. Coons, P. Hough, and A. Hassanein, Appl. Phys. Lett. 0003-6951 95, 221501 (2009). 10.1063/1.3270526
- (2009) Appl. Phys. Lett. , vol.95 , pp. 221501
- Harilal, S.S.¹ Coons, R.W.² Hough, P.³ Hassanein, A.⁴

10
- 38549103102
- High power fiber laser driver for efficient EUV lithography source with tin-doped water droplet targets
- DOI 10.1364/OE.16.000965
- K. Hou, S. George, A. Mordovanakis, K. Takenoshita, J. Nees, B. Lafontaine, M. Richardson, and A. Galvanauskas, Opt. Express 1094-4087 16, 965 (2008). 10.1364/OE.16.000965 (Pubitemid 351162256)
- (2008) Optics Express , vol.16 , Issue.2 , pp. 965-974
- Hou, K.-C.¹ George, S.² Mordovanakis, A.G.³ Takenoshita, K.⁴ Nees, J.⁵ Lafontaine, B.⁶ Richardson, M.⁷ Galvanauskas, A.⁸

11
- 79957572362
- X-Ray Optics and Instrumentation, 687496
- A. Bayer, F. Barkusky, S. Dring, P. Groflmann, and K. Mann, X-Ray Optics and Instrumentation, 687496 (2010).
- (2010)
- Bayer, A.¹ Barkusky, F.² Dring, S.³ Groflmann, P.⁴ Mann, K.⁵

12
- 0004101972
- (Wiley, New York)
- I. Turcu and J. Dance, X-rays from Laser Plasmas: Generation and Applications (Wiley, New York, 1998).
- (1998) X-rays from Laser Plasmas: Generation and Applications
- Turcu, I.¹ Dance, J.²

13
- 77954343426
- 0003-6951, 10.1063/1.3458696
- S. Yuspeh, K. L. Sequoia, Y. Tao, M. S. Tillack, R. A. Burdt, and F. Najmabadi, Appl. Phys. Lett. 0003-6951 96, 261501 (2010). 10.1063/1.3458696
- (2010) Appl. Phys. Lett. , vol.96 , pp. 261501
- Yuspeh, S.¹ Sequoia, K.L.² Tao, Y.³ Tillack, M.S.⁴ Burdt, R.A.⁵ Najmabadi, F.⁶

14
- 57349092465
- 0003-6951, 10.1063/1.3036956
- S. Yuspeh, K. L. Sequoia, Y. Tao, M. S. Tillack, R. Burdt, and F. Najmabadi, Appl. Phys. Lett. 0003-6951 93, 221503 (2008). 10.1063/1.3036956
- (2008) Appl. Phys. Lett. , vol.93 , pp. 221503
- Yuspeh, S.¹ Sequoia, K.L.² Tao, Y.³ Tillack, M.S.⁴ Burdt, R.⁵ Najmabadi, F.⁶

15
- 44849104224
- 0003-6951, 10.1063/1.2938717
- K. L. Sequoia, Y. Tao, S. Yuspeh, R. Burdt, and M. S. Tillack, Appl. Phys. Lett. 0003-6951 92, 221505 (2008). 10.1063/1.2938717
- (2008) Appl. Phys. Lett. , vol.92 , pp. 221505
- Sequoia, K.L.¹ Tao, Y.² Yuspeh, S.³ Burdt, R.⁴ Tillack, M.S.⁵

16
- 85021662307
- 6325 Trevarton Drive, Longmont, CO 80503. Electronic mail: larsen@casinc.com
- J. Larson, h2d is a commercial product of Cascade Applied Sciences Incorporated, 6325 Trevarton Drive, Longmont, CO 80503. Electronic mail: larsen@casinc.com.
- H2d Is A Commercial Product of Cascade Applied Sciences Incorporated
- Larson, J.¹

17
- 28844474834
- Opacity effect on extreme ultraviolet radiation from laser-produced tin plasmas
- DOI 10.1103/PhysRevLett.95.235004, 235004
- S. Fujioka, H. Nishimura, K. Nishihara, A. Sasaki, A. Sunahara, T. Okuno, N. Ueda, T. Ando, Y. Tao, and Y. Shimada, Phys. Rev. Lett. 0031-9007 95, 235004 (2005). 10.1103/PhysRevLett.95.235004 (Pubitemid 41776909)
- (2005) Physical Review Letters , vol.95 , Issue.23 , pp. 1-4
- Fujioka, S.¹ Nishimura, H.² Nishihara, K.³ Sasaki, A.⁴ Sunahara, A.⁵ Okuno, T.⁶ Ueda, N.⁷ Ando, T.⁸ Tao, Y.⁹ Shimada, Y.¹⁰ Hashimoto, K.¹¹ Yamaura, M.¹² Shigemori, K.¹³ Nakai, M.¹⁴ Nagai, K.¹⁵ Norimatsu, T.¹⁶ Nishikawa, T.¹⁷ Miyanaga, N.¹⁸ Izawa, Y.¹⁹ Mima, K.²⁰ more..

18
- 33747372593
- (Westview, Boulder)
- W. Kruer, The Physics of Laser Plasma Interactions (Westview, Boulder, 2003).
- (2003) The Physics of Laser Plasma Interactions
- Kruer, W.¹

19
- 44649180382
- Plasma physics and radiation hydrodynamics in developing
- DOI 10.1063/1.2907154
- K. Nishihara, A. Sunahara, A. Sasaki, M. Nunami, H. Tanuma, S. Fujioka, Y. Shimada, K. Fujima, H. Furukawa, and T. Kato, Phys. Plasmas 1070-664X 15, 056708 (2008). 10.1063/1.2907154 (Pubitemid 351776778)
- (2008) Physics of Plasmas , vol.15 , Issue.5 , pp. 056708
- Nishihara, K.¹ Sunahara, A.² Sasaki, A.³ Nunami, M.⁴ Tanuma, H.⁵ Fujioka, S.⁶ Shimada, Y.⁷ Fujima, K.⁸ Furukawa, H.⁹ Kato, T.¹⁰ Koike, F.¹¹ More, R.¹² Murakami, M.¹³ Nishikawa, T.¹⁴ Zhakhovskii, V.¹⁵ Gamata, K.¹⁶ Takata, A.¹⁷ Ueda, H.¹⁸ Nishimura, H.¹⁹ Izawa, Y.²⁰ Miyanaga, N.²¹ Mima, K.²² more..

20
- 10644267839
- 10.1088/0022-3727/37/23/001 0022-3727
- V. Banine and R. Moors, J. Phys. D: Appl. Phys 37, 3207 (2004). 10.1088/0022-3727/37/23/001 0022-3727
- (2004) J. Phys. D: Appl. Phys , vol.37 , pp. 3207
- Banine, V.¹ Moors, R.²

21
- 67149139972
- 0277-786X, 10.1117/12.814228
- D. Brandt, I. Fomenkov, A. Ershov, W. Partlo, D. Myers, N. Böwering, N. Farrar, G. Vaschenko, O. Khodykin, and A. Bykanov, Proc. SPIE 0277-786X 7271, 727103 (2009). 10.1117/12.814228
- (2009) Proc. SPIE , vol.7271 , pp. 727103
- Brandt, D.¹ Fomenkov, I.² Ershov, A.³ Partlo, W.⁴ Myers, D.⁵ Böwering, N.⁶ Farrar, N.⁷ Vaschenko, G.⁸ Khodykin, O.⁹ Bykanov, A.¹⁰

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.