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Volumn 92, Issue 21, 2008, Pages

Reduction of debris of a CO2 laser-produced Sn plasma extreme ultraviolet source using a magnetic field

Author keywords

[No Author keywords available]

Indexed keywords

CARBON DIOXIDE LASERS; DEBRIS; DEPOSITION; MAGNETIC FIELD EFFECTS; MULTILAYERS; TIN; ULTRAVIOLET RADIATION;

DEBRIS REDUCTION; MULTILAYER MIRRORS;

PLASMAS;

EID: 44449157324 PISSN: 00036951 EISSN: None Source Type: Journal
DOI: 10.1063/1.2938365 Document Type: Article

Times cited : (40)

References (14)

1
- 0000130079
- C. W. Gwyn, R. Stulen, D. Sweeney, and D. Attwood, J. Vac. Sci. Technol. B 16, 3142 (1998).
- (1998) J. Vac. Sci. Technol. B , vol.16 , pp. 3142
- Gwyn, C.W.¹ Stulen, R.² Sweeney, D.³ Attwood, D.⁴

2
- 44449117688
- EUV Source Workshop, Barcelona, October (unpublished).
- A. Miyake, H. Kanazawa, V. Banine, and K. Suzuki, EUV Source Workshop, Barcelona, October 2006 (unpublished).
- (2006)
- Miyake, A.¹ Kanazawa, H.² Banine, V.³ Suzuki, K.⁴

3
- 28844474834
- S. Fujioka, H. Nishimura, K. Nishihara, A. Sasaki, A. Sunahara, T. Okuno, N. Ueda, T. Ando, Y. Tao, Y. Shimada, K. Hashimoto, M. Yamaura, K. Shigemori, M. Nakai, K. Nagai, T. Norimatsu, T. Nishikawa, N. Miyanaga, Y. Izawa, and K. Mima, Phys. Rev. Lett. 95, 235004 (2005).
- (2005) Phys. Rev. Lett. , vol.95 , pp. 235004
- Fujioka, S.¹ Nishimura, H.² Nishihara, K.³ Sasaki, A.⁴ Sunahara, A.⁵ Okuno, T.⁶ Ueda, N.⁷ Ando, T.⁸ Tao, Y.⁹ Shimada, Y.¹⁰ Hashimoto, K.¹¹ Yamaura, M.¹² Shigemori, K.¹³ Nakai, M.¹⁴ Nagai, K.¹⁵ Norimatsu, T.¹⁶ Nishikawa, T.¹⁷ Miyanaga, N.¹⁸ Izawa, Y.¹⁹ Mima, K.²⁰ more..

4
- 23744482333
- H. Tanaka, A. Matsumoto, K. Akinaga, A. Takahashi, and T. Okada, Appl. Phys. Lett. 87, 041503 (2005).
- (2005) Appl. Phys. Lett. , vol.87 , pp. 041503
- Tanaka, H.¹ Matsumoto, A.² Akinaga, K.³ Takahashi, A.⁴ Okada, T.⁵

5
- 36849083445
- Y. Ueno, G. Soumagne, A. Sumitani, A. Endo, and T. Higashiguchi, Appl. Phys. Lett. 91, 231501 (2006).
- (2006) Appl. Phys. Lett. , vol.91 , pp. 231501
- Ueno, Y.¹ Soumagne, G.² Sumitani, A.³ Endo, A.⁴ Higashiguchi, T.⁵

6
- 35248853764
- T. Higashiguchi, M. Kaku, M. Katto, and S. Kubodera, Appl. Phys. Lett. 91, 151503 (2007).
- (2007) Appl. Phys. Lett. , vol.91 , pp. 151503
- Higashiguchi, T.¹ Kaku, M.² Katto, M.³ Kubodera, S.⁴

7
- 33645718452
- H. Komori, Y. Ueno, H. Hoshino, T. Ariga, G. Soumagne, A. Endo, and H. Mizoguchi, Appl. Phys. Lett. 83, 213 (2006).
- (2006) Appl. Phys. Lett. , vol.83 , pp. 213
- Komori, H.¹ Ueno, Y.² Hoshino, H.³ Ariga, T.⁴ Soumagne, G.⁵ Endo, A.⁶ Mizoguchi, H.⁷

8
- 33847243359
- S. S. Harilal, B. O'Shay, Y. Tao, and M. S. Tillack, Appl. Phys. B: Lasers Opt. 86, 547 (2007).
- (2007) Appl. Phys. B: Lasers Opt. , vol.86 , pp. 547
- Harilal, S.S.¹ O'Shay, B.² Tao, Y.³ Tillack, M.S.⁴

9
- 2342535109
- M. Richardson, C.-S. Koay, K. Takenoshita, C. Keyser, and M. Al-Rabban, J. Vac. Sci. Technol. B 22, 785 (2004).
- (2004) J. Vac. Sci. Technol. B , vol.22 , pp. 785
- Richardson, M.¹ Koay, C.-S.² Takenoshita, K.³ Keyser, C.⁴ Al-Rabban, M.⁵

10
- 37549041664
- D. Nakamura, K. Tamaru, Y. Hashimoto, T. Okada, H. Tanaka, and A. Takahashi, J. Appl. Phys. 102, 123310 (2007).
- (2007) J. Appl. Phys. , vol.102 , pp. 123310
- Nakamura, D.¹ Tamaru, K.² Hashimoto, Y.³ Okada, T.⁴ Tanaka, H.⁵ Takahashi, A.⁶

11
- 0037063849
- R. Stuik, F. Scholze, J. Tummler, and F. Bijkerk, Nucl. Instrum. Methods Phys. Res. A 492, 305 (2002).
- (2002) Nucl. Instrum. Methods Phys. Res. A , vol.492 , pp. 305
- Stuik, R.¹ Scholze, F.² Tummler, J.³ Bijkerk, F.⁴

12
- 31644441806
- M. Murakami and M. M. Basko, Phys. Plasmas 13, 012105 (2006).
- (2006) Phys. Plasmas , vol.13 , pp. 012105
- Murakami, M.¹ Basko, M.M.²

13
- 0001519288
- A. Fontell and E. Arminen, Can. J. Phys. 47, 2405 (1969).
- (1969) Can. J. Phys. , vol.47 , pp. 2405
- Fontell, A.¹ Arminen, E.²

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