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Volumn 92, Issue 21, 2008, Pages

Reduction of debris of a CO2 laser-produced Sn plasma extreme ultraviolet source using a magnetic field

Author keywords

[No Author keywords available]

Indexed keywords

CARBON DIOXIDE LASERS; DEBRIS; DEPOSITION; MAGNETIC FIELD EFFECTS; MULTILAYERS; TIN; ULTRAVIOLET RADIATION;

EID: 44449157324     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2938365     Document Type: Article
Times cited : (40)

References (14)
  • 2
    • 44449117688 scopus 로고    scopus 로고
    • EUV Source Workshop, Barcelona, October (unpublished).
    • A. Miyake, H. Kanazawa, V. Banine, and K. Suzuki, EUV Source Workshop, Barcelona, October 2006 (unpublished).
    • (2006)
    • Miyake, A.1    Kanazawa, H.2    Banine, V.3    Suzuki, K.4
  • 14
    • 44449124351 scopus 로고    scopus 로고
    • See
    • See: http://www.srim.org/.


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.