Simulation of particle velocity in a laser-produced tin plasma extreme ultraviolet source

Journal of Applied Physics

Volumn 109, Issue 12, 2011, Pages

  Masnavi, Majid ^a   Nakajima, Mitsuo ^a   Horioka, Kazuhiko ^a   Araghy, Homaira Parchamy ^b   Endo, Akira ^c  

^a TOKYO INSTITUTE OF TECHNOLOGY   (Japan)

^b ISLAMIC AZAD UNIVERSITY   (Iran)

^c FRIEDRICH SCHILLER UNIVERSITY JENA   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

CONSTANT TEMPERATURE; COULOMB POTENTIAL; EUV LIGHT SOURCES; EXTREME ULTRAVIOLET SOURCES; HIGH HEATING RATES; IONIZATION MODEL; LASER FLUENCES; LASER-PRODUCED TIN PLASMAS; LENNARD JONES; LIQUID PHASIS; LIQUID STRUCTURES; MAXIMUM VELOCITY; MOLECULAR DYNAMICS SIMULATIONS; PARTICLE VELOCITIES; PREPULSES; SIMPLIFIED METHOD; TRANSIENT EFFECT; TWO-TEMPERATURE; YTTRIUM ALUMINUM GARNET;

ELECTRIC FIELDS; EXTREME ULTRAVIOLET LITHOGRAPHY; HEATING; LASER PRODUCED PLASMAS; LIGHT SOURCES; LIQUIDS; MOLECULAR DYNAMICS; NEODYMIUM; PHASE TRANSITIONS; TIN; ULTRAVIOLET DEVICES; VELOCITY CONTROL; VELOCITY DISTRIBUTION; YTTRIUM;

ULTRAVIOLET LASERS;

EID: 79960157519     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3601346     Document Type: Article

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