Ion debris mitigation from tin plasma using ambient gas, magnetic field and combined effects

Applied Physics B: Lasers and Optics

Volumn 86, Issue 3, 2007, Pages 547-553

  Harilal, S S ^a   O'Shay, B ^a   Tao, Y ^a   Tillack, M S ^a  

^a UNIVERSITY OF CALIFORNIA SAN DIEGO   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

LASER PRODUCED PLASMAS; LIGHT SOURCES; LITHOGRAPHY; MAGNETIC FIELD EFFECTS; TIN; ULTRAVIOLET RADIATION;

ENERGETIC IONS; ION DEBRIS MITIGATION; TIN PLASMA; ULTRAVIOLET LITHOGRAPHIC LIGHT SOURCE;

IONS;

EID: 33847243359     PISSN: 09462171     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00340-006-2532-3     Document Type: Article

References (33)

1. C. Rajyaguru, T. Higashiguchi, M. Koga, K. Kawasaki, M. Hamada, N. Dojyo, W. Sasaki, S. Kubodera, Appl. Phys. B 80, 409 (2005)
2. C. Rajyaguru, T. Higashiguchi, M. Koga, W. Sasaki, S. Kubodera, Appl. Phys. B 79, 669 (2004)
3. H. Komori, Y. Ueno, H. Hoshino, T. Ariga, G. Soumagne, A. Endo, H. Mizoguchi, Appl. Phys. B 83, 213 (2006)
4. S.S. Harilal, B. O'Shay, Y. Tao, M.S. Tillack, A. Nikroo, C.A. Back, J. Phys. D 39, 484 (2006)
5. S.S. Harilal, M.S. Tillack, Y, Tao, B. O'Shay, R. Paguio, A. Nikroo, Opt. Lett. 31, 1549 (2006)
6. A. Cummings, G. O'Sullivan, P. Dunne, E. Sokell, F. O'Reilly, J. Phys. D 39, 73 (2006)
7. T. Tomie, T. Aota, Y. Ueno, G. Niimi, H. Yashiro, J.Q. Lin, I. Matsushima, K. Komiyama, D.H. Lee, K. Nishigori, H. Yokota, Proc. SPIE 5037, 147 (2003)
8. S.J. Haney, K.W. Berger, G.D. Kubiak, P.D. Rockett, J. Hunter, Appl. Opt. 32, 6934 (1993)
9. M. Richardson, C.S. Koay, K. Takenoshita, C. Keyser, M. Al-Rabban, J. Vac. Sci. Technol. 22, 785 (2004)
10. K. Takenoshita, C.S. Koay, S. Teerawattanasook, M. Richardson, V. Bakshi, Proc. S PIE 5751, 563 (2005)
11. J. Pankert, R. Apetz, K. Bergmann, A. List, M. Locken, C. Metzmacher, W. Neff, S. Probst, Proc. SPIE 5751, 260 (2005)
12. C. Koay, S. George, K. Takenoshita, R. Bernath, E. Fujiwara, M. Richardson, V. Bakshi, Proc. SPIE 5751, 279 (2005)
13. S.S. Harilal, B. O'Shay, M.S. Tillack, J. Appl. Phys. 98, 036 102 (2005)
14. G. Niimi, Y. Ueno, K. Nishigori, T. Aota, H. Yashiro, T. Tomie, Proc. SPIE 5037, 370 (2003)
15. S. Boilanti, F. Bonfigli, E. Burattini, P. Di Lazzaro, F. Flora, A. Grilli, T. Letardi, N. Lisi, A. Marinai, L. Mezi, D. Murra, C. Zheng, Appl. Phys. B 76, 277 (2003)
16. http://www-cxro.lbl.gov/optical_constants/gastrn2.html
17. S.S. Harilal, B. O'Shay, Y. Tao, M.S. Tillack, J. Appl. Phys. 99, 083 303 (2006)
18. D.K. Bhadra, Phys. Fluids 11, 234 (1968)
19. S.S. Harilal, M.S. Tillack, B. O'Shay, C.V. Bindhu, F. Najmabadi, Phys. Rev. E 69, 026 413 (2004)
20. S.S. Harilal, B. O'Shay, M.S. Tillack, C.V. Bindhu, F. Najmabadi, IEEE Trans. Plasma Sci. 33, 474 (2005)
21. J.F. Ziegler, J.P. Biersack, U. Littmark, The Stopping and Range of Ions in Solids (Pergamon Press, New York, 1985)
22. http://www.srim.org
23. A. Cummings, G. O'Sullivan, P. Dunne, E. Sokell, N. Murphy, J. White, K. Fahy, A. Fitzpatrick, L. Gaynor, P. Hayden, D. Kedzierski, D. Kilbane, M. Lysaght, L. McKinney, P. Sheridan, J. Phys. D 37, 2376 (2004)
24. A. Thum-Jager, K. Rohr, J. Phys. D 32, 2827 (1999)
25. S.S. Harilal, Appl. Surf. Sci. 172, 103 (2001)
26. S.S. Harilal, Advances in Laser and Optics Research, ed. by W.T. Lavworth (Nova Science, New York, 2002)
27. S.I. Anisimov, D. Bauerle, B.S. Lukyanchuk, Phys. Rev. B 48, 12 076 (1993)
28. S.S. Harilal, C.V. Bindhu, M.S. Tillack, F. Najmabadi, A.C. Gaeris, J. Appl. Phys. 93, 2380 (2003)
29. S.S. Harilal, C.V. Bindhu, M.S. Tillack, F. Najmabadi, A.C. Gaeris, J. Phys. D 35, 2935 (2002)
30. W.D. Westwood, J. Vac. Sci. Technol. 15, 1 (1978)
31. S. Amoruso, M. Armenante, R. Bruzzese, N. Spinelli, R. Velotta, X. Wang, Appl. Phys. Lett. 76, 249 (2000)
32. R.C. Issac, G.K. Varier, P. Gopinath, S.S. Harilal, V.P.N. Nampoori, C.P.G. Vallabhan, Appl. Phys. A 67, 557 (1998)
33. B. O'Shay, F. Najmabadi, S.S. Harilal, M.S. Tillack, J. Phys. Conf. Series (2007), in press