Lifetime calculations on collector optics from laser plasma extreme ultraviolet sources with minimum mass

Chinese Physics Letters

Volumn 28, Issue 5, 2011, Pages

  Wu, Tao ^a,b   Wang, Xin Bing ^a  

^a HUAZHONG UNIVERSITY OF SCIENCE AND TECHNOLOGY   (China)

^b WUHAN INSTITUTE OF TECHNOLOGY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

CARBON DIOXIDE; CARBON DIOXIDE LASERS; DEBRIS; EXTREME ULTRAVIOLET LITHOGRAPHY; IONS; KINETIC ENERGY; KINETICS; LASER BEAMS; MULTILAYER FILMS; MULTILAYERS; NEODYMIUM LASERS; OPTICAL MULTILAYERS; PULSED LASERS; ULTRAVIOLET LASERS; YTTRIUM ALUMINUM GARNET;

COLLECTOR OPTICS; EXTREME ULTRAVIOLET SOURCES; FLUID MODELING; ION FLUXES; KINETIC ENERGY SPECTRA; LASER-PLASMAS; LIFETIME CALCULATION; MINIMUM MASS; SELF-SIMILAR; SYMMETRICS;

LASER PRODUCED PLASMAS;

EID: 79955889330     PISSN: 0256307X     EISSN: 17413540     Source Type: Journal    
DOI: 10.1088/0256-307X/28/5/055201     Document Type: Article

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