Enhanced dielectric constant resolution of thin insulating films by electrostatic force microscopy

Journal of Physics Condensed Matter

Volumn 24, Issue 15, 2012, Pages

  Castellano Hernandez E ^a   Moreno Llorena, J ^a   Saenz J J ^b   Sacha, G M ^a  

^a UNIVERSIDAD AUTÓNOMA DE MADRID   (Spain)

^b INSTITUTO NICOLÁS CABRERA   (Spain)

Author keywords

[No Author keywords available]

Indexed keywords

ANALYTICAL FORMULAS; BIOLOGICAL PHENOMENA; DIELECTRIC SUBSTRATES; ELECTROSTATIC FORCE MICROSCOPY; EXPERIMENTAL DATA; INSULATING FILM; INSULATING THIN FILMS; LOW DIELECTRIC CONSTANTS; METALLIC ELECTRODES; METALLIC SUBSTRATE; NUMERICAL CALCULATION; THIN INSULATING FILM;

ELECTRIC FORCE MICROSCOPY; ELECTROSTATIC FORCE; INSULATING MATERIALS; PLASTIC FILMS; SUBSTRATES; THIN FILMS;

DIELECTRIC MATERIALS;

ARTICLE; ELECTRODE; IMPEDANCE; METHODOLOGY; MICROSCOPY; STATIC ELECTRICITY;

ELECTRIC IMPEDANCE; ELECTRODES; MICROSCOPY; STATIC ELECTRICITY;

EID: 84859393641     PISSN: 09538984     EISSN: 1361648X     Source Type: Journal    
DOI: 10.1088/0953-8984/24/15/155303     Document Type: Article

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