Freestanding smooth micron-scale polydimethylsiloxane (PDMS) membranes by thermal imprinting

Journal of Micromechanics and Microengineering

Volumn 22, Issue 4, 2012, Pages

  Engel, L ^a   Shklovsky, J ^a   Schrieber, D ^a   Krylov, S ^a   Shacham Diamand, Y ^a  

^a TEL AVIV UNIVERSITY   (Israel)

Author keywords

[No Author keywords available]

Indexed keywords

APPLIED BIAS; CIRCULAR MEMBRANES; DEFECT-FREE MEMBRANES; DIELECTRIC LAYER; ELASTOMER LAYERS; ELASTOMERIC MEMBRANES; ELECTROMECHANICAL CHARACTERISTICS; FABRICATION PROCESS; LATERAL EXPANSION; MICRO ELECTRO MECHANICAL SYSTEM; MICRON SCALE; POLYDIMETHYLSILOXANE MEMBRANE;

ADHESION; ELECTROMECHANICAL DEVICES; MEMS; MONOLAYERS; POLYDIMETHYLSILOXANE; SILICONES;

MEMBRANES;

EID: 84858768963     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/22/4/045003     Document Type: Article

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