Microelectrostrictive actuator with large out-of-plane deformation for flow-control application

Journal of Microelectromechanical Systems

Volumn 16, Issue 3, 2007, Pages 753-764

  Pimpin, Alongkorn ^a   Suzuki, Yuji ^b   Kasagi, Nobuhide ^b  

^a CHULALONGKORN UNIVERSITY   (Thailand)

^b UNIVERSITY OF TOKYO   (Japan)

Author keywords

Electrostrictive polymer; Finite element method (FEM) analysis; Out of plane deformation; Patterned metal electrode; Synthetic jet

Indexed keywords

ELECTROSTRICTION; FINITE ELEMENT METHOD; FLOW CONTROL; MEMS;

ELECTROSTRICTIVE POLYMER; METAL-ELECTRODE ACTUATOR; OUT-OF-PLANE DEFORMATION; PATTERNED METAL ELECTRODE; SYNTHETIC JET;

MICROACTUATORS;

EID: 34547737100     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2007.895222     Document Type: Article

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