Large-stroke dielectric elastomer actuators with ion-implanted electrodes

Journal of Microelectromechanical Systems

Volumn 18, Issue 6, 2009, Pages 1300-1308

  Rosset, Samuel ^a   Niklaus, Muhamed ^a   Dubois, Philippe ^a   Shea, Herbert R ^a  

^a EPFL   (Switzerland)

Author keywords

Dielectric elastomer actuators (DEAs); Electroactive polymers (EAPs); Filtered cathodic vacuum arc (FCVA); Metal ion implantation

Indexed keywords

BREAKDOWN VOLTAGE; CHIP-SCALE; CIRCULAR DIAPHRAGMS; COMPLIANT ELECTRODES; DIAPHRAGM ACTUATOR; DIELECTRIC ELASTOMER ACTUATORS; DYNAMIC CHARACTERIZATION; ELECTROACTIVE POLYMERS; FILTERED CATHODIC VACUUM ARC; FILTERED CATHODIC VACUUM ARC (FCVA); GOLD IONS; IMPLANTED ELECTRODES; LARGE ARRAYS; LARGE-STROKE; LIFETIME TESTS; LOW ENERGIES; LOW-RESISTANCE CONTACTS; MEMBRANE ACTUATORS; METALLIC CLUSTERS; MICRO PUMP; MICRO VALVES; NANO-METER-SCALE; OUT-OF-PLANE DEFLECTION; OUT-OF-PLANE DISPLACEMENT; PDMS SURFACES; POLYDIMETHYLSILOXANE PDMS; PROCESS FLOWS; QUALITY FACTORS; RC TIME CONSTANTS; RESONANCE FREQUENCIES; TIME CONSTANTS; TUNABLE MICROLENS; VOLTAGE-CONTROLLED;

ACTUATORS; CAVITY RESONATORS; DIAPHRAGMS; ELECTRODES; ION BOMBARDMENT; ION IMPLANTATION; MECHANICAL PROPERTIES; METAL IONS; MICROCHANNELS; MICROOPTICS; PLASTICS; PUMPS; RESONANCE; RUBBER; SILICONES; STRAIN; VACUUM; VACUUM APPLICATIONS;

CONDUCTING POLYMERS;

EID: 71549150597     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2009.2031690     Document Type: Article

References (31)

1. S. Ashley, "Artificial muscles," Sci. Amer., vol.289, no.4, pp. 52-59, 2003.
2. F. Carpi, D. D. Rossi, R. Kornbluh, R. Pelrine, and P. Sommer-Larsen, Eds., Dielectric Elastomers as Electromechanical Transducers. Amsterdam, The Netherlands: Elsevier, 2008.
3. G. Kovacs, P. Lochmatter, and M. Wissler, "An arm wrestling robot driven by dielectric elastomer actuators," Smart Mater. Struct., vol.16, no.2, pp. S306-S317, Mar. 2007.
4. F. Carpi, A. Mannini, and D. D. Rossi, "Elastomeric contractile actuators for hand rehabilitation splints," in Proc. SPIE EAPAD, Y. Bar-Cohen, Ed., 2008, vol.6927, p. 692705.
5. V. Sujan and S. Dubowsky, "Design of a lightweight hyper-redundant deployable binary manipulator," J. Mech. Des., vol.126, no.1, pp. 29-39, Jan. 2004.
6. A. Wingert, M. Lichter, S. Dubowsky, and M. Hafez, "Hyper-redundant robot manipulators actuated by optimized binary-dielectric polymers," in Proc. SPIE Int. Soc. Opt. Eng., 2002, vol.4695, pp. 415-423.
7. J. Vogan, A. Wingert, J. S. Plante, S. Dubowsky, M. Hafez, D. Kacher, and F. Jolesz, "Manipulation in MRI devices using electrostrictive polymer actuators: with an application to reconfigurable imaging coils," in Proc. IEEE ICRA, 2004, vol.3, pp. 2498-2504.
8. S. Michel, A. Bormann, C. Jordi, and E. Fink, "Feasibility studies for a bionic propulsion system of a blimp based on dielectric elastomers," in Proc. SPIE EAPAD, Y. Bar-Cohen, Ed., 2008, vol.6927, p. 69270S.
9. R. E. Pelrine, R. D. Kornbluh, and J. P. Joseph, "Electrostriction of polymer dielectrics with compliant electrodes as a means of actuation," Sens. Actuators A, Phys., vol.64, no.1, pp. 77-85, Jan. 1998.
10. F. Carpi, P. Chiarelli, A. Mazzoldi, and D. De Rossi, "Electromechanical characterisation of dielectric elastomer planar actuators: Comparative evaluation of different electrode materials and different counterloads," Sens. Actuators A, Phys., vol.107, no.1, pp. 85-95, Oct. 2003.
11. B. O'Brien, J. Thode, I. Anderson, E. Calius, E. Haemmerle, and S. Xie, "Integrated extension sensor based on resistance and voltage measurement for a dielectric elastomer," in Proc. SPIE EAPAD, San Diego, CA, 2007, vol.6524, pp. 652415-1-652415-11.
12. M. Aschwanden and A. Stemmer, "Low voltage, highly tunable diffraction grating based on dielectric elastomer actuators," in Proc. SPIE EAPAD, San Diego, CA, 2007, vol.6524, pp. 65241N-1-65241N-10.
13. H. Schlaak, M. Jungmann, M. Matysek, and P. Lotz, "Novel multilayer electrostatic solid-state actuators with elastic dielectric," in Proc. SPIE EAPAD, 2005, vol.5759, pp. 121-133.
14. M. Matysek, P. Lotz, T. Winterstein, and H. Schlaak, "Dielectric elastomer actuators for tactile displays," in Proc. World Haptics 3rd Joint EuroHaptics Conf. Symp. Haptic Interfaces Virtual Environ. Teleoperator Syst., 2009, pp. 290-295.
15. R. Pelrine, R. Kornbluh, J. Joseph, R. Heydt, Q. Pei, and S. Chiba, "High-field deformation of elastomeric dielectrics for actuators," Mater. Sci. Eng. C, vol.11, no.2, pp. 89-100, Nov. 2000.
16. A. Pimpin, Y. Suzuki, and N. Kasagi, "Microelectrostrictive actuator with large out-of-plane deformation for flow-control application," J. Micro-electromech. Syst., vol.16, no.3, pp. 753-764, Jun. 2007.
17. M. Niklaus, S. Rosset, M. Dadras, P. Dubois, and H. Shea, "Microstruc-ture of 5 keV gold-implanted polydimethylsiloxane," Scripta Materialia, vol.59, no.8, pp. 893-896, 2008.
18. S. Rosset, M. Niklaus, P. Dubois, and H. Shea, "Metal ion implantation for the fabrication of stretchable electrodes on elastomers," Adv. Funct. Mater., vol.19, no.3, pp. 470-478, 2009.
19. P. Dubois, S. Rosset, S. Koster, J. Stauffer, S. Mikhailov, M. Dadras, N.-F. de Rooij, and H. Shea, "Microactuators based on ion implanted dielectric electroactive polymer (EAP) membranes," Sens. Actuators A, Phys., vol.130/131, pp. 147-154, Aug. 2006.
20. S. Rosset, M. Niklaus, P. Dubois, and H. R. Shea, "Mechanical characterization of a dielectric elastomer microactuator with ion-implanted electrodes," Sens. Actuators A, Phys., vol.144, no.1, pp. 185-193, May 2008. (Pubitemid 351608071)
21. I. Aksenov, V. A. Belous, V. G. Padalka, and V. M. Khoroshikh, "Transport of plasma streams in a curvilinear plasma-optics system," Sov. J. Plasma Phys., vol.4, no.4, pp. 425-428, Jul./Aug. 1978.
22. S. Anders, A. Anders, and I. Brown, "Macroparticle-free thin films produced by an efficient vacuum arc deposition technique," J. Appl. Phys., vol.74, no.6, pp. 4239-4241, Sep. 1993.
23. S. Anders, A. Anders, and I. Brown, "Focused injection of vacuum arc plasmas into curved magnetic filters," J. Appl. Phys., vol.75, no.10, pp. 4895-4899, May 1994.
24. A. Anders, S. Anders, and I. G. Brown, "Effect of duct bias on transport of vacuum arc plasmas through curved magnetic filters," J. Appl. Phys., vol.75, no.10, pp. 4900-4905, May 1994.
25. I.G. Brown, "Vacuum arc metal plasma production and the transition of processing mode from metal ion beam to dc metal plasma immersion," Surf. Coat. Technol., vol.136, no.1-3, pp. 16-22, Feb. 2001.
26. A. Anders, S. Anders, and I. G. Brown, "Transport of vacuum arc plasmas through magnetic macroparticle filters," Plasma Sources Sci. Technol., vol.4, no.1, pp. 1-12, Feb. 1995.
27. P. Lochmatter and G. Kovacs, "Design and characterization of an active hinge segment based on soft dielectric EAPs," Sens. Actuators A, Phys., vol.141, no.2, pp. 577-587, Feb. 2008.
28. M. Aschwanden, D. Niederer, and A. Stemmer, "Tunable transmission gratings based on dielectric elastomer actuators," in Proc. SPIE EAPAD, San Diego, CA, 2008, vol.6927, pp. 6927-6956.
29. F. Carpi, G. Fantoni, P. Guerrini, and D. D. Rossi, "Buckling dielectric elastomer actuators and their use as motors for the eyeballs of an an-droid face," in Proc. SPIE EAPAD, Y. Bar-Cohen, Ed., 2006, vol.6168, p. 61681A.
30. G. Kovacs and L. During, "Contractive tension force stack actuator based on soft dielectric EAP," in Proc. SPIE EAPAD, Y. Bar-Cohen and T. Wallmersperger, Eds., 2009, vol.7287, p. 72870A.
31. S. Sawano, K. Naka, A. Werber, H. Zappe, and S. Konishi, "Sealing method of PDMS as elastic material for MEMS," in Proc. IEEE 21st Int. Conf. MEMS, Jan. 13-17, 2008, pp. 419-422.