The mechanical properties of the rubber elastic polymer polydimethylsiloxane for sensor applications

Journal of Micromechanics and Microengineering

Volumn 7, Issue 3, 1997, Pages 145-147

  Lotters J C ^a   Olthuis, W ^a   Veltink, P H ^a   Bergveld, P ^a  

^a UNIVERSITY OF TWENTE   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

ELASTICITY; GLASS TRANSITION; ION SELECTIVE MEMBRANES; SENSORS; SILICON; TEMPERATURE;

POLYDIMETHYLSILOXANE (PDMS);

RUBBER;

EID: 0031224250     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/7/3/017     Document Type: Article

References (9)

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2. Antonisse M M G, Engbersen J F J and Reinhoudt D N 1995 Nitrate and bicarbonate selective CHEMFETs Proc. Transducers '95 (Stockholm) 1995 (Stockholm: Foundation for Sensor and Actuator Technology) pp 867-9
3. Lötters J C, Olthuis W, Veltink P H and Bergveld P 1996 Polydimethylsiloxane as an elastic material applied in a capacitive accelerometer J. Micromech. Microeng. 6 52-4
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